Shin-etsu Polymer Co., Ltd.

Matsushita Electric Industrial Co., Ltd.

Panasonic Intellectual Property Management Co., Ltd.

Sanyo Electric Co., Ltd.

Panasonic Corporation

Kyoto University

Toray Industries, Inc.

Otsuka Pharmaceutical Company, Limited

Osamu Ogawa

Hiroki Hayashi

Takeshi Takahashi

Hitoshi Nobumasa

Tetsuya Ueda

Satoko Kozono

Yoshinori Tanaka

Atsuo Okaichi

Takeshi Ogata

Osamu Nomura

Keiichi Kurokawa

Kou Komori

Seiya Nakarai

Shinji Miyauchi

Jiro Suzuki

Masahiko Toyonaga

Sachio Nagamitsu

Takatoshi Kaya

Kiminori Tominaga

Masaya Honma

Akira Motohara

Yoshihiro Hattori

Tomonori Kaneko

Dai Hattori

Satoshi Odashima

Takahiro Inoue

Hiroshi Mimura

Hiroshi Toma

Tsutomu Suzuki

Kazuharu Shimizu

Miwaka Takahashi

Fuminori Sakima

Gozoh Tsujimoto

Hideo Akiyama

Shinichi Ohori

Tohru Yoneyama

Chikara Ohyama

Akira Myomoto

Yoshiaki Fujimori

Seiji Naito

Yuki Tobisawa

Atsushi Kakimoto

Takayuki Shiratsuchi

Yoshiaki Nose

Yosuke Kobayashi

Tadahiko Ishizawa

Kota Kimura

Yasuhiro Fujimoto

Yoshikimi Tatsumu

Hisasi Kodama

Kenji Nakayama

Jun Utsumi

Toyokazu Seki

Taiji Tsukamoto

Yoshihiko Hirao

Tsuyoshi Nakamura

Susumu Kagawa

Eijiro Nakamura

Satoshi Imai

A spray device (A) according to the present disclosure includes: a two-fluid nozzle () which sprays a mist (); a spray-device-side gas flow path () for supplying a gas to the two-fluid nozzle (); a gas supply source () which supplies the gas to the spray-device-side gas flow path (); a spray-device-side liquid flow path () for supplying a liquid to the two-fluid nozzle (); a liquid supply source () which supplies the liquid to the spray-device-side liquid flow path (); a pulse-driven liquid flow control valve () having a valve opening degree that is adjusted according to a pulse signal to control the flow rate of the liquid in the spray-device-side liquid flow path (); and a controller () which adjusts, in multiple levels, the concentration of the mist () sprayed from the two-fluid nozzleby adjusting the valve opening degree of the liquid flow control valve

Spray device, spray method, and mist space staging system

A substrate storage container includes a container body configured to store a substrate, a lid that closes the opening of the container body, a retainer that is attached to the lid, and a substrate support portion formed in the retainer. The substrate support portion has an arc shape in a cross-sectional view from the top-to-bottom direction perpendicular to the closing direction of the lid. The substrate support portion includes a pair of left and right substrate support portions configured to hold the substrate together with the container body to retain the substrate.

Substrate storage container

A storage container with improved strength and airtightness, and a method for manufacturing the storage container are provided. The storage container includes, as a functional resin member, an insert component for a container body insert-molded with a molding material containing predetermined resin. The functional resin member is a side wall plate with support pieces. The side wall plate has a thick portion having at least a thickness of a side wall of the container body, and a thin joint portion formed around the thick portion, to be interposed into and joined to a peripheral wall of the container body. Most of the peripheral wall and the thin joint portion are engaged and joined to enlarge their contact area to eliminate a decrease of the mechanical strength and leakage around the peripheral edge of the side wall plate and prevent the peripheral wall from parting from the side wall plate.

Storage container and manufacturing method of the same

A substrate storage container includes: an opening on a front surface side; and a gas supply mechanism on a bottom surface. The gas supply mechanism has: an introduction path configured to receive a gas from a bottom surface side; a check valve disposed at a position that does not overlap with the introduction path in a horizontal plane along the bottom surface; and a flow path configured to supply the gas from the introduction path to the check valve.

A substrate storage container includes a container body configured to store substrates, a lid that closes an opening of the container body, and a valve unit that controls the flow of gas to the container body. The valve unit includes an elastic valve having a valve opening that connects a first passage communicating with the outside of the container body to a second passage communicating with the inside of the container body, a holding member that holds the elastic valve, and a clamping cap that is inserted in the elastic valve and secures the elastic valve to the holding member. The valve opening is tightly closed by the elastic force of the elastic valve.

A substrate storage container comprises a container body capable of containing a plurality of substrates, and an air supply member capable of supplying gas from outside of the container body to an internal space, wherein for the substrate storage container the container body is formed in a front open box and the air supply member is attached to the bottom surface, and wherein a functional unit that changes the environment of the internal space to different states are connected with the air supply member so as to be able to be exchanged.

A substrate storage container and a gas replacement unit capable of reducing variations in humidity or concentration of gas in a space above a substrate are provided. The substrate storage container comprises a container body having an opening and is capable of containing substrates, a lid, at least one intake valve for supplying gas to the inside of the container body, and at least one gas replacement unit which blows out the supplied gas wherein the at least one intake valve is attached to the back, bottom surface of the container body. The gas replacement unit includes a housing member and a cover member. The housing member has a plurality of first group blowout holes in the vertical direction, and the opening area of the top first group blowout hole is larger than the opening area of the second of the first group blowout holes.

Substrate storage container and gas replacement unit

The sealability against interior positive pressure is ensured, while reducing particles generated by friction in opening and closing a lid. Disclosed is a substrate storage container, including: a container body configured to store at least one substrate; and a lid configured to close an opening of the container body. In the substrate storage container, a first part of the container body, the first part being provided around the opening, is non-contact at least partially with a second part of the lid, the second part being opposed to the first part; and the first part and the second part cooperatively form a labyrinth seal structure.

A substrate storage container includes an annular packing provided between a container body for storing substrates and a lid. The container body has a seal surface which is in contact with the packing. The lid is provided with an attachment groove for attaching the packing. The packing is formed of a main body fitted in the attachment groove and an extended piece extending from the main body. The extended piece has a protrusion protruding toward the lid in the closing direction of the lid. A seal portion is located at an end beyond the protrusion. The seal portion is inverted to a side of the seal surface and a side of the main body and comes into contact with the seal surface.

Corrosion resistance of valves is enhanced, while ensuring the check valve function of the valves against an inflow of outside air. Disclosed is a substrate storage container that includes: a container body for storing at least one substrate; a lid for closing an opening of the container body; and at least one valve for controlling gas flow to the container body or from the container body. The at least one valve includes an elastic, non-metallic seal lip in a communication passage that extends in a first direction and communicates between an outside of the container body and an inside of the container body. The seal lip has an umbrella-like form which closes on one side in the first direction and opens on the other side in the first direction, the seal lip abutting an inner peripheral wall of the communication passage on the other side.

Substrate storage container with umbrella-shaped seal lip

The present disclosure provides a substrate storage container equipped with a container main body that has an opening portion formed by an opening frame at a front surface and is capable of storing a plurality of substrates and a lid that closes the opening portion. The container main body is of a box-like shape having the opening frame, a rear wall, a right wall, a left wall, a top wall, and a bottom wall. Each of the walls has a thickness which is thinner at a side toward the opening frame at the front surface than at a side toward the rear wall.

A substrate storage container is provided with a valve body attached thereto which includes a first cylindrical portion having one end communicating with the outside of a container body, a second cylindrical portion having one end communicating with the interior of the container body and spaced apart from the other end of the first cylindrical portion, a plug member positioned between the other end of the first cylindrical portion and the other end of the second cylindrical portion, and an elastic body that covers at least the plug member and has an inner diameter equal to or smaller than the outer diameter of the plug member, and wherein gas flow to the container body is controlled by close contact between the plug member and the elastic body.

A substrate storage container comprises a container body that stores substrates, a lid that closes an opening of the container body, locking mechanisms provided on the lid and locking with the locking portions of the container body, and packing interposed between the container body and the lid, wherein the packing includes a first packing attached to the container body and a second packing attached to the lid, and wherein the first packing and the second packing are located inside the container body from positions of the locking portions when viewed from the direction orthogonal to the closing direction of the lid. As a result, a substrate storage container with improved internal cleanliness can be provided while also improving the sealability with respect to internal negative pressure and positive pressure.

Provided is a substrate storage container including a valve(s) capable of controlling flow of gas without using a metallic member. The valve(s) are attached to a substrate storage container and include: a cylindrical body having an open edge and an interior space; a stopcock portion partitioning the interior space into a first space and a second space and extending to the open edge; and an elastic body covering the open edge and the stopcock portion. The first space has a first communication hole communicating with an outside of the container body. The second space has a second communication hole communicating with an inside of the container body. The elastic body controls flow of gas relative to the container body by closely contacting the stopcock portion or separating from the stopcock portion.

A substrate storage container and gas replacement units are provided in which variations in humidity or concentration in an internal space are small. This is achieved by providing a container body capable of housing substrates, at least one intake valve for supplying an external gas to the internal space of the container body, and gas replacement units for blowing the supplied gas into the internal space of the container body. The container body is formed in an open front box, the intake valve is attached at the back of the bottom surface of the container, the gas replacement units each include a housing member and a cover member, each housing member has a plurality of first blowout holes for blowing the stored gas in one direction, and each cover member has a plurality of second blowout holes for blowing in a direction substantially opposite direction.

Growing community of inventors

Saitama, Japan

Osamu Ogawa