Hitachi High-tech Science Corporation

Other

Nec Corporation

Nippon Telegraph and Telephone Corporation

Nec Laboratories America, Inc.

Tdk Corporation

Akebono Brake Industry Co., Ltd.

Osamu Matsuda

Tomokazu Kozakai

Fumio Aramaki

Anto Yasaka

Yasuhiko Sugiyama

Kazuo Aita

Mitsuru Mochizuki

Hitoshi Seshimo

Ting Wang

Hiroshi Oba

Philip N Ji

Kyota Tsutsumida

Kazumi Masaki

Takahiro Yaguchi

Lane Zong

Kensuke Shiina

Koichi Terunuma

Yuji Abe

Masakazu Mitsuhashi

Tetsuya Mino

Takefumi Oguma

Katsuya Kanakubo

Shin-Ichiro Hayano

Shinichiro Eitoku

Hideo Sugimori

Arthur Dogariu

Katsuyuki Mino

Kojiro Watanabe

Naoto Ogimoto

Lei Zong

Lei Zhong

Nobuaki Hiroshima

Hiroyoshi Iwashima

Hideo Nogami

Isao Sasajima

A route guidance apparatus according to an embodiment of the present disclosure includes a route search unit that performs a route search based on a route search instruction from a user including information indicating a departure place and a destination, a difficulty level calculation unit that calculates a difficulty level for each of the multiple routes obtained as a search result, a required time calculation unit that calculates a required time for each of the multiple routes, a spatial cognitive ability value acquisition unit that acquires a spatial cognitive ability value representing spatial cognitive ability of the user, a route selection unit that selects a route recommended to the user from the multiple routes based on the calculated difficulty level, the calculated required time, and the acquired spatial cognitive ability value, and an output unit that outputs the selected route.

Route guidance apparatus, route guidance method, and program

Appropriate network data for an indoor map can be efficiently generated using input data including a structure of an indoor space. In a network data generation device () that generates, from the input data including at least the structure of the indoor space and information indicating a property based on the structure of the indoor space, network data, the network data including a link representing a movable space on a map and a node that is a starting point or an ending point of the link, a link/node generation unit () generates a set of links and a set of nodes based on the input data.

Network data generator, network data generation method, and program

Routes can be found while improving the convenience of guidance for users. A route-searching device includes a search-condition acquisition unit that acquires search conditions for searching a route including a starting point and a destination; a route-data storage unit that stores a link ID, the node IDs of the starting point and the end point of a link, and road network information concerning a road network and including a link length; an instruction-data storage unit that stores instruction data including a type associated with the node ID, a value for the type, and a coefficient for the value; and a route generation unit that generates route candidates including the shortest route based on the search conditions and the road network information, calculating, for each of the route candidates, an index value based on information included in the instruction data, and outputting, as a search route, the route candidate with the index value improved from the index value of the shortest route.

Route search device, route search method, and route search program

A centerline for generating network data of an indoor space can be generated while limiting the amount of calculation. Points where first straight lines and second straight lines constituting centerlines meet are created using re-entrant vertices (Step). The points created in Stepare connected by lines (Step). Connection lines corresponding to the longest sides are repeatedly deleted from closed polygons defined by the connection lines obtained in Stepuntil no closed polygons are left (Step). Each vertex of the connection lines obtained in Stepis connected to a farthest center point on the perimeter of the shape of the passage if there is such a farthest center point to which the vertex can be connected without touching the perimeter and without crossing other connection lines (Step).

Center line generation device, network data generation system and program

Centerlines for generating network data of an indoor space can be simplified while the amount of calculation is limited. A centerline simplification unitperforms processing of deleting centerlines of passages that are movable regions in an indoor space and processing of correcting centerlines. A determination unitdetermines whether or not the simplification has ended based on the number of centerlines or the number of vertices connecting the centerlines.

Center line simplification device, network data generation system and program

A method of acquiring an image of an image acquiring region of a sample comprises a first step of irradiating and scanning an ion beam in a first scan pattern on a first scan region of a sample, the scan region including therein the image acquiring region, and a second step of detecting secondary charged particles generated by irradiating and scanning the ion beam on the first scan region of the sample and generating first image data of the image acquiring region. The first and second steps are repeated a plurality of times using different scan patterns on different scan regions that differ from the first scan and the first scan region and from one another, each of the different scan regions including therein the image acquiring region, to generate a plurality of image data of the image acquiring region. Image data of the image acquiring region are generated by synthesizing all the image data generated by scanning the different scan region, and the synthesized image data of the image acquiring region are displayed on a display unit.

Method for acquiring image and ion beam apparatus

A method for acquiring an image, in which an image of an image acquiring region is acquired by radiating an ion beam to a sample having a conducting part with a linear edge on a dielectric substrate, includes performing an equal-width scan of the ion beam in a first direction that obliquely intersects the linear edge and sweep in a second direction intersecting the first direction. The ion beam is sequentially scanned in different patterns on different scan regions of parallelogram shape, each of which includes the image acquiring region. Secondary charged particles are detected to generate image data of all the scan regions, and image data of the scan regions are calculated to generate image data of the image acquiring region. The image data of the image acquiring region are synthesized to display the image data of the image acquiring region.

A focused ion beam apparatus is equipped with a gas field ion source that can produce a focused ion beam for a long period of time by stably and continuously emitting ions from the gas field ion source having high luminance, along an optical axis of an ion-optical system for a long period of time. The gas field ion source has an emitter for emitting ions, the emitter having a sharpened end part made of iridium fixed to a cylinder-shaped base part made of dissimilar wire.

Focused ion beam apparatus

There is provided an iridium tip including a pyramid structure having one {100} crystal plane as one of a plurality of pyramid surfaces in a sharpened apex portion of a single crystal with &#x3c;210&#x3e; orientation. The iridium tip is applied to a gas field ion source or an electron source. The gas field ion source and/or the electron source is applied to a focused ion beam apparatus, an electron microscope, an electron beam applied analysis apparatus, an ion-electron multi-beam apparatus, a scanning probe microscope or a mask repair apparatus.

Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus

There is provided a repair apparatus including a gas field ion source which includes an ion generation section including a sharpened tip, a cooling unit which cools the tip, an ion beam column which forms a focused ion beam by focusing ions of a gas generated in the gas field ion source, a sample stage which moves while a sample to be irradiated with the focused ion beam is placed thereon, a sample chamber which accommodates at least the sample stage therein, and a control unit which repairs a mask or a mold for nano-imprint lithography, which is the sample, with the focused ion beam formed by the ion beam column. The gas field ion source generates nitrogen ions as the ions, and the tip is constituted by an iridium single crystal capable of generating the ions.

Repair apparatus

A focused ion beam apparatus has an ion source chamber in which is disposed an emitter for emitting ions. The surface of the emitter is formed of a precious metal, such as platinum, palladium, iridium, rhodium or gold. A gas supply unit supplies nitrogen gas to the ion source chamber so that the nitrogen gas adsorbs on the surface of the emitter. An extracting electrode is spaced from the emitter, and a voltage is applied to the extracting electrode to ionize the adsorbed nitrogen gas and extract nitrogen ions in the form of an ion beam. A temperature control unit controls the temperature of the emitter.

Focused ion beam apparatus with precious metal emitter surface

A focused ion beam system includes a gas field ion source which generates gas ions, an ion gun unit which accelerates the gas ions and radiates the gas ions as an ion beam, a beam optical system which includes at least a focusing lens electrode and radiates the ion beam onto a sample, and an image acquiring mechanism which acquires an FIM image of a tip of an emitter based on the ion beam. The image acquiring mechanism includes an alignment electrode which is disposed between the ion gun unit and the focusing lens electrode and adjusts a radiation direction of the ion beam, an alignment control unit which applies an alignment voltage to the alignment electrode, and an image processing unit which combines a plurality of FIM images acquired when applying different alignment voltages to generate one composite FIM image.

Focused ion beam system

A method for fabricating a sharpened needle-like emitter, the method including: electrolytically polishing an end portion of an electrically conductive emitter material so as to be tapered toward a tip portion thereof; performing a first etching in which the electrolytically polished part of the emitter material is irradiated with a charged-particle beam to form a pyramid-like sharpened part having a vertex including the tip portion; performing a second etching in which the tip portion is further sharpened through field-assisted gas etching, while observing a crystal structure at the tip portion by a field ion microscope and keeping the number of atoms at a leading edge of the tip portion at a predetermined number or less; and heating the emitter material to arrange the atoms at the leading edge of the tip portion of the sharpened part in a pyramid shape.

Method for fabricating emitter

A focused ion beam apparatus has an ion source chamber in which is disposed an emitter for emitting ions. A gas supply unit supplies nitrogen gas to the ion source chamber so that the nitrogen gas adsorbs on the surface of the emitter, and the gas supply unit maintains the pressure in the ion source chamber in the range 1.0&#xd7;10Pa to 1.0&#xd7;10Pa. An extracting electrode is spaced from the emitter, and a voltage is applied to the extracting electrode to ionize the adsorbed nitrogen gas and extract nitrogen ions in the form of an ion beam. A temperature control unit controls the temperature of the emitter.

Growing community of inventors

Tokyo, Japan

Osamu Matsuda