Seiko Epson Corporation

Ngk Insulators, Inc.

Osamu Kawauchi

Shinya Aoki

Juichiro Matsuzawa

Masaru Mikami

Takashi Yamazaki

Akihiko Ebina

Katsumi Takayama

Takayuki Kikuchi

Keiichi Yamaguchi

Takao Soma

Yusuke Kinoshita

Masashi Shimura

Koji Watanabe

Yoshihiko Yokoyama

Mitsuru Nagai

Yoshio Morita

Shogo Sasaki

Kenji Sakurai

Shigeki Miyazawa

Manabu Takeuchi

Kenichiro Murata

Hisashi Mikoshiba

A vibrator device includes: a base; a vibrator disposed in the base; and a lid including a substrate having a light transmitting property and a silicon substrate joined to the substrate and a part of the base surrounding the vibrator.

Vibrator device, manufacturing method of vibrator device, electronic device, and vehicle

The vibrator element includes a base part, a vibrating arm extending from the base part, and a weight provided to the vibrating arm, wherein the weight includes a thick film part, a thin film part thinner in film thickness than the thick film part, and a connection part which is located between the thick film part and the thin film part to connect the thick film part and the thin film part to each other, and which forms a taper shape gradually decreasing in film thickness in a direction from the thick film part side toward the thin film part.

Vibrator element and vibrator device

A MEMS element includes a surface silicon layer on which an element is formed and on which a first electrode and a second electrode as element electrodes and an electrode pad connected to the first electrode and the second electrode are disposed, and in which a first wiring through-hole is disposed at a position overlapping with the electrode pad of the surface silicon layer and a wiring electrode electrically connected to the electrode pad is disposed in the first wiring through-hole, in plan view.

MEMS element, sealing structure, electronic device, electronic apparatus, and vehicle

A manufacturing method of an electronic device, that accommodates a gyro element as an electronic component in an inner space formed by a base and a lid as a lid body, includes: preparing the lid in which a groove is provided on the rear surface which is welded with the base, and an opening area of the groove on the inner space side which is greater than an opening area on the outer periphery side of the lid; welding, first, the base and the lid at a portion excluding an unwelded portion that includes at least apart of the groove, of a planned welding portion of the base and the lid; and welding, second, the base and the lid at the unwelded portion such that the groove is closed.

Manufacturing method of electronic device, electronic device, electronic apparatus, moving object, and lid body

A manufacturing method of an electronic device, that accommodates a gyro element as an electronic component in an inner space formed by a base and a lid as a lid body, includes: preparing the lid in which a groove is provided on a surface which is welded with the base, and an opening area of the groove on the inner space side which is smaller than an opening area on the outer periphery side of the lid; welding, first, the base and the lid at a portion excluding an unwelded portion that includes at least apart of the groove, of a planned welding portion of the base and the lid; and welding, second, the base and the lid at the unwelded portion such that the groove is closed.

A method of manufacturing an electronic device in which an inner space for housing a gyro element is formed between a base and a lid and the base and the lid are bonded includes bonding the base and the lid in which a groove is provided on a surface to be bonded with the base so that the inner space communicates with the outside by not bonding the inner surface of the groove to the base and to position the groove around a concave portion provided on a side surface of the base, and closing a communication portion by irradiating a laser beam to the lid in the communication portion.

Method of manufacturing electronic device, electronic device, electronic apparatus, and moving object

A gyro vibration piece detecting an angular velocity includes a supporting part, a driving part connected to the supporting part and performing vibration, and a detection part detecting vibration generated by Coriolis force generated by the rotation of the driving part. A connection part includes a connection portion having a fin and an end portion connected between at least one of a side of the driving part and a side of the supporting part and a side of the detection part and a side of the supporting part. The end portion includes a top surface and a side surface, whereby the side surface is substantially perpendicular to the top surface and includes a circular arc shape disposed along a bottom portion thereof opposite to a junction of the top surface and the side surface.

Gyro vibration piece and gyro sensor

A piezo-electric vibration reedincluding connection arms extended in opposing directions from a base, drive arms extended in a direction perpendicular to the connection arms at the respective tips of the connection armsand, and detection arms extended from the basein a direction perpendicular to the connection arms. In the respective tips of the drive arms, and the detection arms, there are formed a first deadweight portion and a second deadweight portion, which are adjustment portions used for mass adjustment. The adjustment portions are formed of deadweight layers and an electrode film.

Vibration type gyroscope and method for manufacturing vibration type gyroscope

A piezoelectric device and method comprising a piezoelectric vibrating reedand excitation electrodes which are mounted in a package having a package baseand outer terminals using a TAB tapecomposed of a plurality of electrical conductors formed on an insulating material with each of the plurality of electrical conductors disposed in an arrangement forming predetermined winding patternsthereon with the wiring patternsinterconnecting the excitation electrodes to the outer terminals.

Piezoelectric device and method for manufacturing the same

A device for measuring a physical value, such as a vibratory gyroscope, is provided. The device comprises a vibrator; a driving means for exciting a driving vibration in the vibrator; a detecting means for obtaining an output signal based on a detection vibration excited in the vibrator in response with the physical value; and a detection circuit for processing the output signal to provide a detection signal corresponding with the physical value. The vibrator has at least one bending vibration armsA andB vibrating in bending mode along a specified plane (X-Y plane). The bending vibration arm comprises at least a pair of base partsA,B and a connecting partconnecting the base partsA,B. The connecting and base parts define a pair of recessesA,B.

Devices for measuring physical values and vibrators

The invention provides a piezoelectric vibration gyro element including a pair of detecting resonant arms at its center, connecting arms each on, the right and left of the center, and a pair of driving resonant arms at each far end of the connecting arms, which makes it possible to secure the symmetry of the resonant arms' flexure and vibrating, and easily and accurately separate electrodes. In particular, two side surfaces of extension parts that extend along the direction in which each end surface of connecting arms extends, flat surfaces are provided to both sides in a direction perpendicular to the direction in which driving resonant arms extend. A wiring passing across the end surface of the extension parts in its thickness direction and joining front and back main surfaces of the end surface of the connecting arms and the extension parts can be formed so as to electrically couple the first driving electrodes each on the front and back main surfaces of the driving resonant arms. The exposure for electrode separation can be done from the above in a direction perpendicular to the flat surface of the extension part and with a given angle to the main surfaces of the driving resonant arms so as to simultaneously expose the main surfaces and side surfaces to light.

Piezoelectric vibration gyro element, method for manufacturing the same, and piezoelectric vibration gyro sensor

The invention provides a method of sealing piezoelectric devices with covers capable of rapidly and securely sealing a plurality of packages or many packages of piezoelectric devices with covers. A piezoelectric device includes a package in which a piezoelectric vibrating reed is partially supported and fixed, and a cover fixed to the packages. In a method of sealing the packages with the covers, a plurality of the packages are arranged with the bottoms facing halogen lamps, so that the bottoms are irradiated with the light beams from the halogen lamps to thermally melt a brazing material disposed between the packages and the covers.

Piezoelectric device and cover sealing method and apparatus therefor, cellular phone apparatus using piezoelectric device and electronic apparatus using piezoelectric device

A package structure for a piezoelectric resonator includes a base which has a shape of flat box and made of an insulating material, and a thin lid bonded to the upper side of the base. A tuning fork type quartz crystal resonator piece is mounted at its one end, that is its base end, on electrode pads provided on the mounting surface in a cantilever manner using conductive adhesive so that it is parallel to the mounting surface, and hermetically sealed in a package with the lid engaged therewith. Either one or both of the mounting surface of the base and the inner surface of the lid has a recess formed at the location adjacent to the free end of a tuning fork type quartz crystal resonator piece so that the free end does not touch the inside surfaces of the packages when the quartz crystal resonator piece is largely dislocated on external impact.

Growing community of inventors

Shiojiri, Japan

Osamu Kawauchi