Nhk Spring Co., Ltd.

Nippon Thompson Co., Ltd.

Renesas Electronics Corporation

Osamu Ito

Toshio Kazama

Hajime Arai

Yoshio Yamada

Takaaki Tsuboi

Kohei Hironaka

Kazuya Soma

Shigeyuki Yoshida

Mitsuhiro Kondo

Masafumi Shiratani

A probe holder includes: a first layered member including members layered over one another; and a second layered member bonded to the first layered member and including members layered over one another. Each of the first and second layered members includes: a first member made of a material having a low dielectric constant; a second member provided on one of surfaces of the first member and having higher hardness than the first member; and a third member provided on the other surface of the first member and having higher hardness than the first member. The probe holder further includes a holder hole formed by bonding the third members of the first and second layered members, the holder hole penetrating the probe holder in a direction in which the first and second layered members are layered, and having a stepped hole shape having a smaller diameter in the second members.

Probe holder and probe unit

A contact structure unit that achieves electrical continuity between a substrate, which includes a plurality of electrodes, and a contact object includes a first-type contact-carrying member including a contact portion which makes contact with the contact object; includes a plurality of second-type contact-carrying members each of which includes a leading end portion formed at one end portion and making contact with the electrodes and each of which makes contact with the first-type contact-carrying member at the other end portion; and includes a plurality of coil springs each of which is disposed between the contact portion and the leading end portions and each of which biases the contact portion and the leading end portions.

Contact structure unit

A probe-unit base member having high rigidity and requiring no troublesome operations for its manufacture and a probe unit are provided. To achieve the purpose, the probe-unit base member includes a conductive substratethat has a first openingcapable of fitting therein a probe holderand a second openingcommunicated with the first opening; a coatingthat is made of an insulating adhesive agent and is coated at least on an edge of the second opening; and an insulating guide memberthat is bonded to the edge of the second openingthrough the coatingand guides one of two contact bodies to a position in contact with probes

Probe-unit base member and probe unit

A polishing apparatus includes a polishing table with a polishing pad at an upper surface, and a conditioning disc carrying out conditioning of the polishing pad, and a moving mechanism (constructed, for example, from a swing arm) capable of moving the conditioning disc to a standby position above the polishing pad, and a spraying mechanism (constructed, for example, from a washing water nozzle) that sprays liquid to the conditioning disc positioned at the standby position so as to wash or wet the conditioning disc.

Polishing apparatus and polishing method

The present invention provides a braking device of a linear motor table which can stop in a fixed state of the table when the electrical feed is cut off. A braking device 11 is installed, which comprises: a shaft 12 extending in the direction of movement and attached to the table 42; a retainer 14 movably inserted onto the shaft 12; balls 15 inserted into the pocket of the retainer 14 and rolling along the shaft 12; an outer cylinder 16 located including the retainer 14 and having a tapered surface 16a on the inside of the outer cylinder; a coil spring 18 for urging retainer 14 to be jammed onto the tapered surface 16a; and a linear electromagnetic solenoid 17 which urge the retainer 14 for making the balls 15 release the tapered surface 16a. When the electrical feed is cut off, the balls 15 are jammed on the tapered surface 16a by the action of a wedge, and the table is stopped.

Braking device of a linear motor table

The present invention relates to a braking apparatus for a linear motion guiding apparatus that is able to completely stop a moving portion in the form of table 2 at a desired position by performing braking action by causing a linear motion actuator in the form of a piezoelectric actuator and so forth to activate friction members 58 and 59.

Growing community of inventors

Kanagawa, Japan

Osamu Ito