Seiko Epson Corporation

Osamu Ishii

Masataka Nomura

Shiro Murakami

Takao Morita

Yusuke Sugimoto

A piezoelectric vibration element includes a piezoelectric substrate including a thin vibration region and a thick section integrated along three sides excluding one side of the vibration region, excitation electrodes respectively arranged on the front and rear surfaces of the vibration region, and lead electrodes. The thick section includes a first thick section and a second thick section arranged to be opposed to each other across the vibration region and a third thick section connected between proximal ends of the first and second thick sections. The second thick section includes an inclined section connected to the one side of the vibration region, a second thick section main body connected to the other side of the inclined section, and at least one slit for stress relaxation.

Piezoelectric vibration element, manufacturing method for piezoelectric vibration element, piezoelectric resonator, electronic device, and electronic apparatus

A resonator element includes a vibrating portion that vibrates in a thickness shear vibration and includes a first main surface and a second main surface which are in a front and back relationship to each other, a first excitation electrode that is provided on the first main surface, and a second excitation electrode that is provided on the second main surface, and an energy trapping coefficient M satisfies a relationship of 33.6&#x2266;M&#x2266;65.1.

Resonator element, resonator, electronic device, electronic apparatus, and moving object

A piezoelectric resonating element includes a piezoelectric substrate that includes a rectangular vibrating section and a thick section integrally formed with the vibrating section, excitation electrodes, and lead electrodes. The thick section includes a first thick section and a second thick section of which one end is formed continuous to the first thick section. The first thick section includes a first inclined section of which the thickness changes and a first thick section main body of a quadrangle column shape, and at least one slit is provided in the first thick section.

Resonating element, resonator, electronic device, electronic apparatus, and mobile object

A resonator element includes a substrate including a vibrating portion that performs thickness-shear vibration and an excitation electrode provided on top and bottom main surfaces of the vibrating portion. Assuming that the average plate thickness calculated from the plate thicknesses of a plurality of regions of the vibrating portion is H and the plate thickness difference, which is a difference between the maximum and minimum values of the plate thicknesses of the plurality of regions of the vibrating portion, is &#x394;H, 0%&#x3c;&#x394;H/H&#x2266;0.085% is satisfied as a relationship between H and &#x394;H.

Resonator element, resonator, electronic device, electronic apparatus, and method of manufacturing resonator element

A resonator element includes a substrate including a first principal surface and a second principal surface respectively forming an obverse surface and a reverse surface of the substrate, and vibrating in a thickness-shear vibration mode, a first excitation electrode disposed on the first principal surface, and a second excitation electrode disposed on the second principal surface, and being larger than the first excitation electrode in a plan view, the first excitation electrode is disposed so as to fit into an outer edge of the second excitation electrode in the plan view, and the energy trap confficient M fulfills 15.5&#x2266;M&#x2266;36.7.

Resonator element, resonator, electronic device, electronic apparatus, and mobile object

A resonator element includes a substrate vibrating in a thickness-shear vibration mode, a first excitation electrode disposed on one principal surface of the substrate, and has a shape obtained by cutting out four corners of a quadrangle, and a second excitation electrode disposed on the other principal surface of the substrate, and a ratio (S/S) between the area Sof the quadrangle and the area Sof the first excitation electrode fulfills 87.7%&#x2266;(S/S)&#x3c;95.0%.

A resonating element includes a resonator element that includes a vibrating portion and an excitation electrode provided on both main surfaces of the vibrating portion, an intermediate substrate in which the resonator element is mounted so as to be spaced from the excitation electrode, and a spiral electrode pattern that is provided on at least one main surface of the intermediate substrate, in which the electrode pattern is electrically connected to the excitation electrode.

Resonating element, resonator, electronic device, electronic apparatus, and moving body

A piezoelectric resonating element includes a piezoelectric substrate having a rectangular vibrating portion and a thick-walled portion, excitation electrodes and, and lead electrodes. The thick-walled portion includes a fourth thick-walled portion, a third thick-walled portion, a first thick-walled portion, and a second thick-walled portion. The third thick-walled portion includes a third slope portion and a third thick-walled body, and at least one slit is formed in the third thick-walled portion.

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Tatsuno, Japan

Osamu Ishii