Ebara Corporation

Rorze Corporation

Osamu Horita

Toshiaki Fujii

Yoshihiko Naito

Kazutoshi Nagai

Fumio Sakiya

Koji Ohyama

Mineo Kinpara

Toshiya Nakayama

Fumio Rorze Corporation Sakiya

Mineo Rorze Corporation Kinpara

A loader is provided, which is disposed in a low cleanliness room along a border between the low cleanliness room and a high cleanliness room, for transporting a dust free article between an inside of a container receiving the dust free article and the high cleanliness room, comprising a movable stage for mounting the container; an opening portion through which the dust free article is transported between the container and the high cleanliness room; a door for opening and closing the opening portion; a unifying means for unifying a cover of the container and the door when the container approaches the door; and a driving apparatus for moving the cover and the door unified within the loader to open and close the opening portion and the container.

Container and loader for substrate

A carrier box for a semiconductor substrate, including an opening and closing mechanism for taking the semiconductor in or out of the box The box is provided with a gas cleaning device A- which uses a photo-electron or the photo-catalyst actuated by light irradiation for cleaning an inside of the box, or a gas cleaning unit including the gas cleaning device and a rechargeable battery for supplying the gas cleaning device with electricity and integrated into the gas cleaning unit, and thereby providing a practically efficient function to remove particles or gaseous harmful components.

Carrier box for semiconductor substrate

A magnetic field type mass spectrometer having an ion source, an ion accelerator, a mass separation magnet forming an analyzing part which changes the trajectory of ions by a magnetic field of the mass separation magnet, and a current detector, wherein the mass separation magnet is installed so that ions move along a trajectory which turns several times in the analyzing part, and repelling electrodes are installed at turning points of the ions, whereby ions generated from the ion source are caused to move along a trajectory which turns several times in the analyzing part. Mass separation is carried out along each trajectory, which provides high resolution.

Magnetic field type mass spectrometer

A compact mass spectrometer apparatus is presented to enable accurate qualitative and quantitative analyses of target ions. The apparatus can operate in a relatively poor vacuum in the range of 10.sup.-2 to 10.sup.-3 torr compared with the conventional requirement of 10.sup.-6 to 10.sup.-8 torr while providing precision results with lesser number of electrodes than the conventional mass spectrometer. The separation of the ionic species is achieved through two effects: flight time differentials produced by varying mass/charge ratios of the sample ions; as well as high frequency resonance separation by synchronizing the injection of ions with high frequency electric field applied to an electrode system having equi-potential space and high frequency space. The resulting dispersion in the wide energy spectra of the sample ions serves to accurately identify the sample ions both qualitatively and quantitatively. The spectra dispersion is achieved by modulating the ion beam with application of suitable magnitude and phase angle of the high frequency voltage, and allowing only those ions having the maximum kinetic energy to pass through to a collector electrode. The analyses are based on measurements of the maximum ion current flowing in the collector electrode.

High frequency mass spectrometer

Growing community of inventors

Fujisawa, Japan

Osamu Horita