Tdk Corporation

Osamu Harakawa

Yuichiro Yamaji

Makoto Kameno

A magnetic sensor includes a sensor chip mounted on a substrate such that an element formation surface thereof is perpendicular to the surface of the substrate and a magnetism collecting member mounted on the substrate such that a surface thereof faces the element formation surface. The magnetism collecting member has a surface positioned on the side opposite to the surface, and both the surfaces are flattened. This reduces a gap between the element formation surface and the magnetism collecting member and reduces variations among products. In addition, since the surface is also flattened, the magnetism collecting member has no directionality with respect to the sensor chip when it is mounted on the substrate, so that working efficiency during assembly can be improved.

Magnetic sensor and its manufacturing method

A magnetic sensor includes a sensor chip mounted on a substrate such that an element formation surface thereof is perpendicular to the substrate and a magnetism collecting member mounted on the substrate such that a surface thereof faces the substrate and a surface thereof faces the element formation surface. The arithmetic mean waviness Wa of the surface of the magnetism collecting member is 0.1 μm or less. When the arithmetic mean waviness Wa of the surface of the magnetism collecting member that faces the element formation surface is set to 0.1 μm or less, it is possible to significantly suppress a deterioration in detection sensitivity due to the presence of a gap between the element formation surface and the magnetism collecting member and to significantly reduce variations in detection sensitivity among products.

Growing community of inventors

Binan, Philippines

Osamu Harakawa