Yokogawa Electric Corporation

Nikon Corporation

Niles Parts Company, Ltd.

Nissan Motor Company Limited

Shimizu Construction Co., Ltd.

Dainihon Glass Industry Co., Ltd.

Osamu Furukawa

Nobutaka Magome

Hiroyuki Suzuki

Masahiko Yasuda

Masaharu Kawakubo

Hiroki Tateno

Yuji Imai

Hiroshi Seki

Shinji Wakamoto

Satoshi Matsuura

Minoru Sugita

Teruyuki Nakatsuji

Kimitoshi Ryokai

Tsuyoshi Sotome

Masayoshi Sato

Hideo Hirai

Kenichi Ishizuka

Hirotaka Kawasaki

Kenichi Sekine

Masayoshi Yamazaki

Michio Imai

Takanori Hirai

Takuro Odawara

Arinori Nimura

Satoru Miura

An abnormal temperature detection device includes a temperature acquirer configured to acquire temperature data; a preprocessor configured to perform preprocessing of calculating a feature amount of the temperature data; a synthesizer configured to perform synthesis processing of synthesizing the feature amount and past determination information indicating whether the temperature data acquired in the past is normal or abnormal; a learner configured to generate an identification model by performing machine learning on a result of synthesis by the synthesizer; and a determiner configured to determine whether temperature data for detection which is acquired by the temperature acquirer, and on which the preprocessing is performed by the preprocessor and the synthesis processing is performed by the synthesizer, is normal or abnormal by using the identification model.

Abnormal temperature detection device, abnormal temperature detection method, and non-transitory computer readable storage medium

An abnormal temperature detection device includes a temperature acquirer configured to acquire temperature data, a preprocessor configured to perform preprocessing for calculating difference data indicating a difference sequence in the temperature data, generating substituted data in which either of a piece of difference data which is a positive number or a piece of difference data which is a negative number is substituted with zero, and calculating a similarity between the substituted data and reference data obtained from training data in which normality or abnormality has been identified, a learner configured to perform machine learning on the similarity calculated by the preprocessor and output an identification function, and a determiner configured to determine whether temperature data for detection acquired by the temperature acquirer and subjected to the preprocessing by the preprocessor is normal or abnormal by using the identification function.

Abnormal temperature detection device, abnormal temperature detection method, and storage medium

An optical fiber characteristics measuring apparatus includes: a light source that outputs frequency-modulated continuous wave of light; a first optical branching unit that branches the continuous light into pump light and reference light; a second optical branching unit that outputs backscattered light generated by making the pump light incident from one end of an optical fiber to be measured, wherein the backscattered light is Brillouin scattering in the optical fiber; a detector that detects interference light of the backscattered light and the reference light; a measuring unit that measures characteristics of the optical fiber by using a detection signal output from the detector; and a controller that controls the light source to change modulation frequency of the continuous light in units of one period or half a period of a modulation period corresponding to the modulation frequency.

Optical fiber characteristics measuring apparatus and optical fiber characteristics measuring method

An optical fiber characteristic measurement device includes: a detector that detects Brillouin scattered light obtained by causing light to be incident on an optical fiber under test; a spectrum analyzer that obtains a Brillouin gain spectrum from the Brillouin scattered light; and a spectrum analyzing controller that: measures a characteristic of the optical fiber under test by analyzing the Brillouin gain spectrum to obtain a peak frequency of the Brillouin gain spectrum, and changes a frequency range used by the spectrum analyzer to obtain the Brillouin gain spectrum according to the peak frequency.

Optical fiber characteristic measurement device and optical fiber characteristic measurement method

A measuring apparatus for contactlessly measuring vibration or displacement of a measurement target includes a light source configured to emit a continuous wave of light frequency-modulated to arrange a measurement site of the measurement target within a correlation peak, a divider configured to divide the continuous wave of light into first and second divided-waves of light, a light receiver configured to receive interfering light of the first divided-wave of light reflected by the measurement target and the second divided-wave of light, and a calculator configured to calculate the vibration or displacement of the measurement target using an electric signal output from the light receiver.

Measuring apparatus for measuring vibration or displacement and method for measuring vibration or displacement

An optical fiber characteristic measuring device of the present invention includes a light source, an optical divider, an optical waveguide, a first separator, a second separator, a first interferer, a second interferer, and a calculator. The light source is configured to generate a frequency modulated continuous wave of light. The optical divider is configured to divide the frequency modulated continuous wave of light into first and second divided-waves of light. The optical waveguide is configured to guide the first divided-wave of light to one end of an optical fiber to be measured. The first separator is configured to separate a backscattered light generated by Brillouin scattering of the first divided-wave of light in the optical fiber to be measured into a first scattered light, which is a linearly polarized light, and a second scattered light, which is a linearly polarized light perpendicular to the first scattered light.

Optical fiber characteristic measuring device

A frequency dividing circuit includes: a D-type flip flop that outputs frequency-divided signal synchronized with input clock and reverse phase signal corresponding to the frequency-divided signal; a variable delay circuit that generates a delay feedback signal delayed by a specific delay time from the reverse phase signal input from the D-type flip flop and feeds back the delay feedback signal to the D-type flip flop; and a delay adjusting circuit that detects a phase difference between the reverse phase signal input from the D-type flip flop and the delay feedback signal input from the variable delay circuit, obtains detected results, and outputs to the variable delay circuit a control signal to perform control so that the delay time becomes time required to ensure setup/hold time of the D-type flip flop, based on the detected results.

Frequency dividing circuit

A method of transferring a pattern of a mask onto shot areas on a substrate determines two sets of parameters in a single model equation. The parameters in one of the two sets relate to arrangement of a plurality of shot areas on the substrate, and the parameters in the other set relate to the shot areas per se. The mask and the substrate are moved relatively in accordance with the determined parameters.

Alignment method and apparatus therefor

A low cost automotive power window switch having few window operating switches uses a single switch to select which of the four windows to operate, and to control the window locks. The power window switch has a window operating switch for raising and lowering each of the car windows, and a mode selector switch for switching between the windows. The mode selector switch also has a window lock switch function for locking and unlocking the windows.

Multiple switch device

A method of obtaining an optimum exposure condition of a step-and-scan exposure apparatus, the step-and-scan exposure apparatus synchronously moving a mask and a substrate relative to an illumination light to transfer a pattern of the mask onto a plurality of shot areas on the substrate, the method comprising the steps of determining an unevenness of an illuminance of the illumination light, adjusting the illumination light to change the illuminance within a predetermined range, inputting a plurality of first exposure conditions into the step-and-scan exposure apparatus, testing the plurality of first exposure condition in a step-and-repeat mode.

Method of measuring exposure condition in projection exposure apparatus

The present invention relates, to an exposure method, exposure apparatus, and the like having a configuration for effectively preventing color inconsistencies from occurring due to defocusing upon scanning exposure. In particular, the exposure method and apparatus according to the present invention control the scanning exposure according to the positional relationship between a substrate and a detection area for detecting a focus state of the substrate, the positional relationship between individual shot areas on the substrate the positional relationship between a shot area on the substrate and an edge of the substrate, or the like.

Scanning exposure method detecting focus during relative movement between energy beam and substrate

A method of aligning each of a plurality of processing areas arranged on a substrate with a predetermined transfer position in a static coordinate system XY for defining a moving position of said substrate, a pattern of a mask being transferred to each of the plurality of processing areas, the method comprising the steps of: wherein each of the plurality of processing areas has a specific point and a plurality of marks for alignment arranged by a predetermined positional relationship with respect to said specific point; measuring coordinate positions of a predetermined number of marks selected from several processing areas of the plurality of processing areas on the static coordinate system XY; calculating a plurality of parameters in a model equation expressing the regularity of arrangement of the plurality of processing areas by performing a statistic calculation by use with the measured plurality of coordinate positions, arrangement coordinate values upon the design of the specific points of the several processing areas and relative arrangement coordinate values upon the design of the selected marks of the several processing areas with respect to corresponding the specific points on the several processing areas; and determining coordinate positions of respective said specific points of the plurality of processing areas on the static coordinate system XY by using the calculated parameters.

A two-step operation switch device, in which intervals between a common fixed contact and other fixed contacts juxtaposed to the common fixed contact are kept as wide as possible so that insulating properties between the contacts are maintained in a normal state. The common fixed contact 11, first fixed contacts 12, 13, and second fixed contacts 14, 15 are disposed on an insulating plate 1. A movable contacting piece 2 has a first contacting piece 21 slid in a first region, in which the common fixed contact 11 and the first fixed contacts 12 and 13 are juxtaposed, and a second contacting piece 22 slid in a second region, in which the common fixed contact 11 and the second fixed contacts 14 and 15 are juxtaposed. Intervals W2 between the common fixed contact 11 and the second fixed contacts 14 and 15 in the second region Z2 are wider than intervals between the common fixed contact 11 and the first fixed contacts 12 and 13 in the first region Z1. A width W4 of the common fixed contact 11 on the second region Z2 side is greater than a width W3 thereof on the first region Z1 side so that the movable contacting piece 2 is connected with the first fixed contacts 12 and 13 in the first region Z1 and the common fixed contact 11 in the second region Z2, when the movable contacting piece 2 is at first positions MU and MD.

Switch including two step sequential operation

A switch assembly with internal electronic components that enables easy assembly and is dustproof, and that can be oriented relative to the main board of a power window control switch or other devices with a lesser degree of limitation and has a wide variety of applications. A plurality of electronic components are mounted to one side of a plate 1. A plurality of switch electrodes 3 are formed in the other side of the plate 1. A switch case 6 is resiliently fit over the base plate 1. The switch case 6 includes an elongated aperture 61 within which a lever 41 of a switch operating mechanism 4 is loosely fit, pawls 62 adapted for resilient engagement with the base plate 1, projections 63 and a base 64. The switch operating mechanism 4 holds a movable contact 5. The switch case 6 defines a space 65 adjacent to the switch operating mechanism 4 and the movable contact 5. The switch electrodes 3 are sealably contained within the space 65 when the switch case 6 is resiliently fit over the base plate 1. The lever 41 includes a plurality of combined projections and recesses 41a to 41f arranged in a direction transverse to the direction in which the switch operating mechanism 4 is moved.

Switch assembly with internal electronic components

A projection exposure method and apparatus are disclosed, which can perform a focusing operation with respect to a partly omitted shot exposed at a peripheral portion of a photosensitive substrate such as a wafer. In the projection exposure method and apparatus, when a prohibition band having a predetermined width is set from the edge of the substrate, and exposure is to be performed with respect to a shot area having a portion located only within the prohibition band and the remaining portion located outside the edge of the substrate, a focus detection point is shifted to the boundary line of the prohibition band on the substrate, and a focusing operation is performed. Thereafter, the focus detection point is moved to an original target shot exposure position to perform exposure.

Growing community of inventors

Tokyo, Japan

Osamu Furukawa