Shimadzu Corporation

Osamu Ashida

Koichi Shimizu

Kohei Oue

Taiki Nishimura

Fusao Nakamura

A vacuum pumping device comprises: a turbo-molecular pump; an backing pump connected to an outlet side of the turbo-molecular pump; a measurement section configured to measure first elapsed time until a suction-port-side pressure of the backing pump reaches a predetermined pressure higher than a turbo-molecular pump startable pressure and lower than an atmospheric pressure after start of the backing pump; an arithmetic section configured to calculate, based on the first elapsed time measured by the measurement section, the atmospheric pressure, and the predetermined pressure, second elapsed time until the suction-port-side pressure reaches the turbo-molecular pump startable pressure after the start of the backing pump; and a start control section configured to start the turbo-molecular pump when the second elapsed time has elapsed after the start of the backing pump.

Vacuum pumping device and vacuum pumping device starting method

A vacuum pump for rotary driving a rotor by a motor to perform vacuum pumping, wherein a motor rotor of the motor includes a yoke fixed to a shaft of the rotor, and a permanent magnet held at the yoke, and the yoke includes a holding portion provided apart from the shaft and configured to hold the permanent magnet, and a pair of fitting portions provided respectively at both ends of the holding portion in an axial direction and bonded to the shaft by fitting, and a radial thickness dimension of each fitting portion is set less than that of the holding portion.

Vacuum pump

A vacuum pump comprises: a ball bearing which supports a rotor; a holding section which elastically holds an outer ring of the ball bearing; and a grease which is filled between the outer ring and the holding section, the grease having a consistency of NLGI No. 1.5 or less.

A vacuum pump which, among others, has a lubricated ball bearing for supporting a rotor shaft of a motor, a bearing holder for holding the lubricated ball bearing, a first labyrinth seal provided between a motor arrangement space and a bearing arrangement space, and a balance adjustment member installed at a position of the rotor shaft to face the bearing holder and used for balance adjustment of a rotating body. A second concave and convex part to be fitted to the first concave and convex part forming the first labyrinth seal. By reducing a gap of the bearing arrangement space, the space in which the oil vapor is filled is reduced. Therefore, a moving amount of the gas, and thus, the decrease in the base oil of the lubricant can be suppressed, thereby extending the lubricating life.

A rotary vacuum pump includes a pump casing on which an intake port flange is formed, a rotor which has a rotating side evacuating device and is driven to rotate at high speed inside the pump casing, and a fixing side evacuating device which is provided inside the pump casing and generates an evacuating effect together with the rotating side evacuating device. The intake port flange is fastened to a device subject to evacuating by a bolt. A through-hole is formed in the intake port flange for inserting the bolt and has a diameter larger than that of the bolt. A gap forming device for forming a gap between the bolt and the through-hole in the intake port flange is provided on a matching surface of the through-hole.

Growing community of inventors

Kyoto, Japan

Osamu Ashida