Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kla Corporation (1 from 532 patents)
1 patent:
1. 11221561 - System and method for wafer-by-wafer overlay feedforward and lot-to-lot feedback control