Cymer, Inc.

Flying Gybe Inc.

Omar Zurita

Ivan Lalovic

Gregory Allen Rechtsteiner

Eric Anders Mason

Nicholas Tufillaro

Thomas Patrick Duffey

Rostislav Rokitski

Willard Earl Conley

Thomas Frederick Allen Bibby, Jr

Rui Jiang

Paolo Alagna

Simon Hsieh

Abhishek Subramanian

Jason J Lee

Robert Jay Rafac

Ivan Lalović

Philipp Grötsch

A hyperspectral sensing device may include an optical collector configured to collect light and to transfer the collected light to a sensor having spectral resolution sufficient for sensing hyperspectral data. In some examples, the sensor comprises a compact spectrometer. The device further comprises a power supply, an electronics module, and an input/output hub enabling the device to transmit acquired data (e.g., to a remote server). In some examples, a plurality of hyperspectral sensing devices are deployed as a network to acquire data over a relatively large area. Methods are disclosed for performing dark-current calibration and/or radiometric calibration on data obtained by the hyperspectral sensing device, and/or another suitable device. Data obtained by the device may be represented in a functional basis space, enabling computations that utilize all of the hyperspectral data without loss of information.

Hyperspectral sensing system and processing methods for hyperspectral data

A method for retrieving a corrected spectrum from a measured spectrum (e.g., retrieving a top-of-water spectrum from a measured top-of-atmosphere spectrum) includes creating a scene-specific model of a region of interest and performing a ray-tracing simulation to simulate rays of light that would reach an airborne (or spaceborne) sensor. The region of interest can be an optically complex area such as an inland or coastal body of water. Based on the ray-tracing simulation, a scene-specific correction for unwanted effects (e.g., adjacency effects, variable atmospheric conditions, and/or other suitable effects) is obtained. A corrected spectrum is obtained by correcting the measured spectrum using the scene-specific correction. The ray-tracing simulation may be performed using a graphical processing unit, allowing the scene-specific correction to be performed in real time or near real time.

Hyperspectral sensing system and methods

Methods and apparatus for processing an image of a beam generated by an optical system to extract information indicative of an extent of damage to optical elements in the optical system. Also disclosed is a beam image and analysis tool capable of acquiring an image of a beam at any one of a number of locations.

Lithography optics adjustment and monitoring

A photolithography method includes producing, from an optical source, a pulsed light beam; and scanning the pulsed light beam across a substrate of a lithography exposure apparatus to expose the substrate with the pulsed light beam including exposing each sub-area of the substrate with the pulsed light beam. A sub-area is a portion of a total area of the substrate. For each sub-area of the substrate, a lithography performance parameter associated with the sub-area of the substrate is received; the received lithography performance parameter is analyzed, and, based on the analysis, a first spectral feature of the pulsed light beam is modified and a second spectral feature of the pulsed light beam is maintained.

Wafer-based light source parameter control

A photolithography method includes instructing an optical source to produce a pulsed light beam; scanning the pulsed light beam across a wafer of a lithography exposure apparatus to expose the wafer with the pulsed light beam; during scanning of the pulsed light beam across the wafer, receiving a characteristic of the pulsed light beam at the wafer; receiving a determined value of a physical property of a wafer for a particular pulsed light beam characteristic; and based on the pulsed light beam characteristic that is received during scanning and the received determined value of the physical property, modifying a performance parameter of the pulsed light beam during scanning across the wafer.

A photolithography system includes an optical system, an actuation apparatus, and a control module. The optical system includes an optical source that produces a pulsed light beam traveling along a beam path; a plurality of optical components positioned between the optical source and a photolithography exposure apparatus, at least some of the plurality of optical components configured to receive the pulsed light beam and direct the pulsed light beam to the photolithography exposure apparatus; and an optical element positioned to interact with the pulsed light beam. The actuation apparatus is coupled to the optical element. The actuation apparatus is configured to adjust a physical property of the optical element based on a control signal from the control module to thereby adjust a polarization of the pulsed light beam.

Polarization control of pulsed light beam

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San Diego, CA, United States of America

Omar Zurita