Asml Netherlands B.v.

Olof Martinus Josephus Fischer

Fidelus Adrianus Boon

Hans Butler

Sven Antoin Johan Hol

Maarten Hartger Kimman

Christiaan Alexander Hoogendam

Patricius Aloysius Jacobus Tinnemans

Arno Jan Bleeker

Koen Jacobus Johannes Maria Zaal

Harmen Klaas Van Der Schoot

Marc Wilhelmus Maria Van Der Wijst

Theodorus Petrus Maria Cadee

Ruud Antonius Catharina Maria Beerens

Bernardus Antonius Slaghekke

Wilhelmus Henricus Theodorus Maria Aangenent

Pieter Renaat Maria Hennus

Antonie Hendrik Verweij

Peter Michel Silvester Maria Heijmans

Hendrikus Herman Marie Cox

Niels Johannes Maria Bosch

Martinus Hendricus Henricus Hoeks

Eric Pierre-Yves Vennat

Edwin Van Horne

Johannes Marinus Maria Rovers

Theodorus Mattheus Joannus Maria Huizinga

The present invention provides a tubular linear actuator, comprising: a tubular coil assembly comprising multiple tubular coils arranged next to each other in longitudinal direction of the tubular linear actuator and concentric with respect to a longitudinal axis of the tubular linear actuator, and a magnet assembly comprising a series of permanent magnets with alternating polarization direction extending in the longitudinal direction, wherein the magnet assembly is at least partially arranged in the coil assembly and movably with respect to the coil assembly, wherein the tubular coils comprise edge windings.

Tubular linear actuator, patterning device masking device and lithographic apparatus

The invention relates to a bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, comprising a magnetic gravity compensator. The magnetic gravity compensator comprises: a first permanent magnet assembly mounted to one of the first part and the second part and comprising at least a first column of permanent magnets, the first column extending in the vertical direction, wherein the permanent magnets have a polarization direction in a first horizontal direction or in a second horizontal direction opposite to the first horizontal direction, wherein vertically adjacent permanent magnets have opposite polarization directions, a second permanent magnet assembly mounted to the other of the first part and the second part and comprising at least one other column of permanent magnets, the at least one other column extending in the vertical direction, wherein vertically adjacent permanent magnets of the at least one other column have opposite polarization directions in the first horizontal direction or the second horizontal direction, wherein the first permanent magnet assembly at least partially encloses the second permanent magnet assembly.

Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness

An electromagnetic actuator is described the actuator comprising:

Lithographic apparatus and device manufacturing method

A Lorentz actuator includes: a magnet arrangement; a coil arrangement; and a current controller for supplying a current to the coil arrangement; wherein the magnet and coil arrangement are moveable relative to each other in a main direction, wherein the coil arrangement has a first and second coil portion that are separately operable by the current controller, such that when the same current is supplied to the first coil portion as is supplied to the second coil portion, Lorentz forces generated in the main direction by the first and second coil portions are also the same, and wherein the current controller is configured to supply a current to the first and second coil portions with a phase difference in order to compensate for parasitic reluctance and/or Lorentz forces in an auxiliary direction perpendicular to the main direction.

Lorentz actuator, object positioning system, lithographic apparatus and Lorentz actuator operating method

A support for a movable element includes a stator element, a gravity compensator field inducing element mounted on the stator element, the gravity compensator field inducing element configured to apply a translational force to the movable element by controlling a magnetic field in a gap between the stator element and the movable element, and a plurality of torque compensator field inducing elements mounted on the stator element, the torque compensator field inducing elements configured to apply a torque to the movable element by controlling a magnetic field in the gap between the stator element and the movable element, the torque being about a first axis substantially perpendicular to the direction of the translational force applied by the gravity compensator field inducing element.

Support for a movable element and lithography apparatus

A magnetic device includes first and second parts, a first magnetic part, with a first magnetic polarization, coupled to the first part, a second magnetic part, with a second magnetic polarization, coupled to the second part and an additional magnetic part coupled to the first part and having an additional magnetic polarization. The first and second magnetic parts magnetically interact with each other. The first magnetic part exerts a first force on the second magnetic part, the second magnetic part exerts a second force on the first magnetic part and the first and second forces have opposite directions that are parallel to a reference direction. The first magnetic polarization is substantially parallel to the reference direction, the second magnetic polarization is substantially perpendicular to the reference direction, the additional magnetic polarization makes an angle with the first magnetic polarization and has a magnitude in a range of about 90&#xb0;-270&#xb0;.

Magnetic device and lithographic apparatus

An exposure apparatus including a projection system configured to project a plurality of radiation beams onto a target; a movable frame that is at least rotatable around an axis; and an actuator system configured to displace the movable frame to an axis away from an axis corresponding to the geometric center of the movable frame and to cause the frame to rotate around an axis through the center of mass of the frame.

Growing community of inventors

Veldhoven, Netherlands

Olof Martinus Josephus Fischer