American Air Liquide, Inc.

Air Liquide Electronics U.S. LP

Olivier Letessier

Christian Dussarrat

Nathan Stafford

Ravi Kumar Laxman

Vincent M Omarjee

Benjamin J Feist

Methods and compositions for the deposition of a film on a substrate. In general, the disclosed compositions and methods utilize a precursor containing calcium or strontium.

Alkali earth metal precursors for depositing calcium and strontium containing films

Methods of storing a precursor which decreases the precursor decomposition rate. A vessel is provided, where the vessel has an outer surface made of a first material, and an inner surface made of a second material. The first and second materials are different. A tantalum containing precursor is placed inside the vessel, and the vessel is heated to a temperature between 60&#xb0; C. and 150&#xb0; C. At least part of the precursor is withdrawn from the vessel.

Low decomposition storage of a tantalum precursor

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San Jose, CA, United States of America

Olivier Letessier