Riber

Olivier Grange

Jean-Louis Guyaux

Franck Stemmelen

Jean Louis Guyaux

The leak detection device is adapted to test the tightness of an inner tank () of a valve cell () of the vacuum deposition apparatus, either at its filling flange () or at its inner tank valve (). A vacuum deposition apparatus equipped with a helium detector () mounted as a by-pass of the output of a high-flow-rate turbomolecular pump () which is connected to the vacuum deposition chamber () of the vacuum deposition apparatus by a slide gate valve (). A valve-cell vacuum deposition apparatus equipped with a helium-based leak detection device including gas injection elements () adapted to inject a gaseous mixture into the outer enclosure, the gaseous mixture being consisted of pure helium and an inert gas, and a method for detecting a leak in a valve-cell vacuum deposition apparatus are also described.

Valve-cell vacuum deposition apparatus including a leak detection device and method for detecting a leak in a vacuum deposition apparatus

An injector for a vacuum evaporation source includes an injection duct () having a longitudinal axis () and an inlet port () able to be connected to a vacuum evaporation source, and at least one nozzle () for diffusing a vaporized material, the nozzle () having a lateral face (), and an upper face (). The nozzle () includes a main channel () emerging outside the injection duct () and at least a lateral feeding channel () connecting the interior of the injection duct () to the main channel (). The lateral feeding channel () has a lateral orifice () emerging inside the injection duct () through the lateral face () of the nozzle () for avoiding the clogging of the nozzle () by oxidized materials.

Growing community of inventors

Saint-Cloud, France

Olivier Grange