L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des

L'air Liquide, Societe Anonyme a Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude

Olivier Delobel

Jean Louise

Philippe Cornut

Nicolas Blanchard

Florent Chaffotte

Linda Lefevre

The invention relates to a gas quenching method of the type that makes use of (i) a quenching cell (V) which is intended to receive objects to be quenched with a quenching gas and (ii) a buffer capacity (V) which is designed to contain the quenching gas. The invention is characterised in that following a quenching operation, all or part of the gas contained in the cell (V) is recycled in the following manner consisting in: obtaining a first intermediate storage balloon (V) which can receive the quenching gas from the cell; after a quenching operation, performing one or more operations comprising the partial emptying of the contents of the cell (V) into the first intermediate storage balloon (V), by means of partial or total pressure balancing between the two volumes of the cell (V) and the first intermediate storage balloon; transferring the gas stored in the first intermediate storage balloon (V) to the buffer capacity (V); and, if necessary, releasing part of the contents of the cell (V) into the atmosphere.

Gas quenching method using a recycling facility

The invention concerns a process for removing gaseous hydrides from a solid support of metallic oxides, which consists in causing a gas flow to circulate, at room temperature, on a solid support comprising at least copper and chromium and having a specific area lower than or equal to 100 m.sup.2 /g. This process may be used for the destruction of gaseous hydrides from the industry of semi-conductors, for example silanes, arsine, phosphine, diborane, germane, stannane, gallane, stibine, and hydrogen telluride, selenide and sulfide.

Process for removing gaseous hydrides from a solid support comprising

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Paris, France

Olivier Delobel