Nxp Usa, Inc.

Institut National Polytechnique De Toulouse

Olivier Bernal

Jerome Romain Enjalbert

Thierry Dominique Yves Cassagnes

Helene Catherine Louise Tap

Thierry Bosch

Lavinia Elena Ciotirca

Francis Bony

Usman Zabit

A microelectromechanical device comprising a mass, an electromechanical transducer configured to convert, after damping the mass during a first damping period, displacement of the mass in the first and second directions into corresponding first and second electrical signals during corresponding first and second conversion time periods, a derivative unit configured to generate first and second control signals indicative of the velocity of the mass in the first and second direction, and a controller for providing the first and second control signals to respective first and second one or more electrodes of the electromechanical transducer for simultaneously damping the mass in the first and second directions with a first and second damping forces corresponding to the first and second velocity during the damping time period.

Microelectromechanical device and a method of damping a mass thereof

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Toulouse, France

Olivier Bernal