Hochschule Fur Technik Und Wirtschaft Des Sarlandes

Siegert Thinfilm Technology Gmbh

Olivia Freitag-Weber

Wolfgang Brode

Günther Schultes

Ralf Koppert

Ulf Werner

Dirk Göttel

The invention relates to a film resistor () comprising a carbon-containing material () into which clusters () of conductive cluster material are introduced, wherein the conductive cluster material has a positive temperature coefficient. The clusters () are surrounded by a graphite casing and embedded in the carbon-containing material (). Furthermore, the cluster material is present in a thermodynamically stable phase. The invention also relates to a method for producing a film resistor (), wherein a PVD process is carried out on a carrier substrate () using a sputtering material under a reactive atmosphere of a carbon-containing gas, and therefore the carbon-containing gas is dissociated and a carbon-containing layer () is deposited on the carrier substrate (), with clusters () of the sputtering material being embedded in said carbon-containing layer, wherein the carbon-containing layer () is heated to a predetermined temperature while the PVD process is carried out, with the sputtering material or a compound of the sputtering material forming in a stable phase at said temperature.

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Schwalbach, Germany

Olivia Freitag-Weber