Average Co-Inventor Count = 12.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Smt Gmbh (1 from 1,409 patents)
2. Carl-zeiss-smt Ag (1 from 461 patents)
2 patents:
1. 8520307 - Optical integrator for an illumination system of a microlithographic projection exposure apparatus
2. 7880969 - Optical integrator for an illumination system of a microlithographic projection exposure apparatus