W.c. Heraeus Gmbh & Co Kg

Heraeus Materials Technology Gmbh & Co. Kg

Oliver Warkentin

David Francis Lupton

Ralf Heck

Bernd Stenger

Harald Manhardt

Verena Baier

Uwe Hortig

The addition of 0.5 to 30 ppm boron and 0.5 to 20 ppm calcium to iridium and the Zr- and Hf-free alloys thereof and rhodium and the Zr- and Hf-free alloys thereof surprisingly increases the creep rupture strength at high temperatures, in particular around 1,800&#xb0; C.

Increasing the strength of iridium, rhodium, and alloys thereof

A hollow cylindrical target for a cathode sputtering unit with a hollow cylindrical sputtering material and a target holder is disclosed. The sputtering material has an annular cross section and concentrically surrounds a longitudinal segment of the target holder. The target holder extends out of the sputtering material at least at one end of the target to allow connection to the cathode sputtering unit. The at least one part of the target holder that extends from the sputtering material is a single part that can be detached from the target by at least one screw fitting.

Hollow cylindrical cathode sputtering target and process for producing it

Growing community of inventors

Darmstadt, Germany

Oliver Warkentin