Suss Microtec Lithography Gmbh

Ist Metz Gmbh

Oliver Treichel

Gregory George

Kader Mekias

Joachim Jung

Urs Gümbel

Aaron Foley

Günter Fuchs

Klaus Ebinger

Stefan Jung, Legal Representative

Melanie Niemann, Nee Jung, Legal Representative

Suayib Kartal

Carsten Jung, Legal Representative

Greg George

Armin Beying

Robert Kretzschmar-Bareiß

Ruben Cremer

Maik Coconcelli

A baking device for a wafer coated with a coating containing a solvent is described, having a baking chamber, a support for the wafer, an inlet for a purge gas, and an evacuation for the purge gas charged with solvent evaporated from the coating. The inlet is formed as a diffusion element arranged above the wafer so as to admit the purge gas evenly over substantially the entire surface of the wafer, and the evacuation is formed as an evacuation ring which radially surrounds the diffusion element and is arranged at a ceiling of the baking chamber.

Baking device for a wafer coated with a coating containing a solvent

A bottle cap adapter for supplying liquids, particularly viscous liquids, comprising: a body part; and a vent tube comprising a first opening and a second opening, the first opening being configured to be put inside a bottle in the vicinity of the bottom of the bottle, wherein the body part further comprises a first surface and a second surface, the first surface being perpendicular to the vent tube and the second surface being parallel to or tilted to the first surface, e.g., by an angle of 0&#xb0; to 40&#xb0;, wherein the body part further comprises a channel from the first surface to the second surface, wherein at least one part of the channel comprises a connector extending to the second surface, the connector being complementary to a connector of the bottle, wherein the body part is further configured to be coupled to a bottle supply system, and wherein the vent tube is at least partially located in the channel of the body part. Also a bottle supply system for supplying liquids, particularly viscous liquids, comprising: a top part configured to house a bottle cap adapter; a bottom part comprising a reservoir configured to receive an amount of liquid from a bottle inserted in the bottle cap adapter and comprising a pressure sensor configured to measure a fluid level in the bottle; and an output connected to the reservoir.

Bottle supply system and bottle cap adapter

The invention relates to an irradiation unit for the UV irradiation of particularly web-shaped substrates, comprising a housing (), a tubular UV lamp (), arranged therein and a reflector arrangement (), running along the UV lamp (). According to the invention, a simple exchangeability may be achieved, whereby the reflector arrangement comprises a support profile (), retained in the housing () and a reflector profile (), embodied as a shape-retaining molded piece which may be detachably connected thereto.

UV irradiation unit for substrates

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Stuttgart, Germany

Oliver Treichel