Aixtron Se

Aixtron Ag

Oliver Schön

Francisco Ruda Y Witt

Holger Jürgensen

Michael Heuken

Peter Sebald Lauffer

Daniel Brien

Thomas Schmitt

Dietmar Schmitz

Marcus Schaffrath

Pascal Tillmanns

Gert Strauch

Harry Protzmann

During a process involving one or more process steps of a process phase, in which a substrate is located in the process chamber of a CVD reactor, a process temperature and a pressure are each set and a process gas flow is fed into the process chamber by way of control data delivered by a controller in accordance with a formula stored in the controller. Additionally, sensors are used to determine measurement data from which a current fingerprint is calculated and then compared with a historic fingerprint. The fingerprint includes only values or groups of values that are obtained from measured values that are recorded during one or more conditioning steps of a conditioning phase in which a conditioning temperature and a conditioning pressure are each set and a conditioning gas flow is fed into the process chamber in accordance with control data specified by the formula.

Method for recording a state of a CVD reactor under production conditions

A gas outlet surface of a gas inlet element for a CVD reactor or a gas outlet surface of a shielding plate for a gas inlet element has a multiplicity of gas outlet openings arranged around a center of the gas outlet surface. The central points of the gas outlet openings lie at the corner points of polygonal, identically formed cells, each having a geometrical central point. The position and the length of the edges of the cells are defined by intersecting reference lines, the reference lines being assigned to at least two families of lines, and the reference lines of a respective family extending linearly and parallel to one another over an entirety of the gas outlet surface. The center of the gas outlet surface is separated from one of the corner points by one-third±10 percent of the length of one of the edges.

Gas-inlet element for a CVD reactor

A susceptor for a CVD reactor includes a flat circular disc-shaped body with channels that are arranged on a broad side of the disc-shaped body within one or more circular surface sections extending on a plane in order to transfer heat to a substrate holder. The channels run about respective centers of the one or more circular surface sections in a spiral manner and are formed as depressions that are open towards the plane. An end of each of the channels has a channel opening, the channel openings being fluidically connected to a feed opening arranged at the end of a gas supply line. Additionally, the one or more surface sections are equipped with one or more influencing elements that influence the local heat transfer and are formed as open depressions on the plane or as insert pieces that plug into the depressions.

Susceptor for a CVD reactor

The invention relates to a device for depositing semiconductor layers, comprising a process chamber () arranged substantially rotationally symmetrically about a center (), a susceptor (), a process chamber ceiling (), a gas inlet element () having gas inlet chambers () that are arranged vertically on top of each other, and a heater () arranged below the susceptor (), wherein the topmost () of the gas inlet chambers is directly adjacent to the process chamber ceiling () and is connected to a feed line () for feeding a hydride together with a carrier gas into the process chamber (), wherein the lowest () of the gas inlet chambers is directly adjacent to the susceptor () and is connected to a feed line () for feeding a hydride together with a carrier gas into the process chamber (), wherein at least one center gas inlet chamber () arranged between the lowest () and the topmost () gas inlet chamber is connected to a feed line () for feeding an organometallic compound into the process chamber (). According to the invention, the gas inlet chambers () are closed off toward the process chamber () by annular walls (), wherein the annular walls () comprise a plurality a gas outlet openings () arranged closely next to each other, have a uniform outside diameter, and an outer wall that is substantially without projections and directed toward the process chamber ().

MOCVD reactor having cylindrical gas inlet element

What is described here is a method and a temperature management and reaction chamber system for the production of nitrogenous semiconductor crystal materials of the form ABCNM, wherein A, B, C represent elements of group II or III, N represents nitrogen, M represents an element of group V or VI, and X, Y, Z, V, W represent the mol fraction of each element in this compound, operating on the basis of gas phase compositions and gas phase successions. The invention excels itself by the provisions that for the production of the semiconductor crystal materials the production process is controlled by the precise temperature control of defined positions in the reaction chamber system under predetermined conditions.

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Herzogenrath, Germany

Oliver Schön