Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Maxim Integrated Gmbh

Oliver Schwarzelbach

Wolfgang Reinert

Peter Merz

Marten Oldsen

Manfred Weiss

Volker Kempe

Exemplary embodiments relate to a sensor for detecting an acceleration acting on the sensor, having: a substrate, a mass unit, which acts as an inert mass in the event of the presence of an acceleration, a fixing structure, wherein the mass unit is articulated on the substrate in such a way that at least one pivot axis is defined, about which the mass unit can perform a rotation relative to the substrate as a result of an acceleration acting on the sensor, and the mass unit has an interial center of gravity, which is at a distance from the respective pivot axis, and at least one detection unit, with which a change in position between the mass unit and the substrate may be detected. The detection unit is arranged with respect to the mass unit in such a way that a deformation of the mass unit cannot be transferred to the detection unit.

Sensor for detecting acceleration

The present application relates to a multiple component which is to be subsequently individualized by forming components containing active structures, in addition to a corresponding component which can be used in microsystem technology systems. The multiple component and/or component comprises a flat substrate and also a flat cap structure which are bound to each other such that they surround at least one first and one second cavity per component, which are sealed against each other and towards the outside. The first of the two cavities is provided with getter material and due to the getter material has a different internal pressure and/or a different gas composition than the second cavity. The present application also relates to a method for producing the type of component and/or components for which gas mixtures of various types of gas have a different absorption ratio in relation to the getter material.

Micromechanical housing comprising at least two cavities having different internal pressure and/or different gas compositions and method for the production thereof

An angular rate sensor for detecting a rotation includes a substrate, at least one oscillating element that can be excited so as to oscillate rotationally or radially, an anchor structure, one or several detecting elements, one or several joining elements that connect the detecting element/s to the oscillating element, a mechanism for exciting the oscillating element, and a device for detecting a radial or rotational oscillation of the detecting element/s. Each of the detecting elements can oscillate radially on the same plane on which rotational oscillation of the oscillating element occurs, or vice versa, while the centrifugal force Fz caused by the rotational oscillation will not cause any significant radial movement of the detecting element/s or the oscillating elements. Also disclosed are different methods for operating said sensor.

Growing community of inventors

Itzehoe, Germany

Oliver Schwarzelbach