Nanoworld Ag

Oliver Krause

Thomas Sulzbach

Mathieu Burri

Manfred Detterbeck

Bernd Irmer

Christian Penzkofer

Christoph Lehrer

Silke Petersen

A method of manufacturing an SPM probe having a support element, a cantilever, and a scanning tip on an underside of the cantilever, and having a mark located on the top side of the cantilever opposite the scanning tip. The mark on the top side of the cantilever is located exactly opposite the scanning tip on the underside of the cantilever. This makes it possible to identify the exact position of the scanning tip in the scanning probe microscope from the upward-pointing top side of the cantilever, which significantly simplifies the alignment of the SPM probe. The support element with the cantilever may be prefabricated conventionally and the scanning tip and the mark are then produced on the cantilever in a self-aligning way by means of a particle-beam-induced material deposition based on a gas-induced process.

Method of manufacturing an SPM probe with a scanning tip and with an alignment aid located opposite the scanning tip

An SPM sensor () for a scanning probe microscope with a cantilever (), a holding element () at one end of the cantilever () and a sensor tip () at the other end of the cantilever () and to a method for producing sensors of this type. The electron beam induced deposition (EBID or, shorter, EBD) structure () is anchored directly in the substrate of the sensor tip (). The anchoring of the EBD structure () takes place with positive and nonpositive engagement in a hole () in the sensor tip (), which is created by material removal in the substrate of the sensor tip (). The method comprises the creation of the EBD structure by particle beam induced material deposition in the hole of the sensor tip.

SPM sensor

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Erlangen, Germany

Oliver Krause