Carl Zeiss Smt Gmbh

Oliver Gloeckl

Johannes Kraus

Vitaliy Shklover

Jeffrey Erxmeyer

Konstantin Forcht

Horst Feldermann

Michael Schall

Ute Heinemeyer

Markus Deubel

An optical assembly reduces a spectral bandwidth of an output beam of a laser. The assembly includes a beam-expanding optical unit within a laser resonator. The latter serves to increase a beam cross section of a resonator-internal laser beam in at least one expansion cross-sectional dimension such that at least one resonator-internal expansion laser beam section arises. The assembly also includes an optical grating in a retroreflective arrangement for the resonator-internal laser beam. A beam-limiting stop acts in the expansion cross-sectional dimension and is arranged in the beam path of the expansion laser beam section. This yields an optical assembly in which unwanted thermal effects on account of optical components of the optical assembly heating during laser operation due to a local power density of the resonator-internal laser beam are reduced or avoided.

Optical assembly for reducing a spectral bandwidth of an output beam of a laser

In order to make possible both good laser resistance and good antireflection properties, an optical element, in particular for UV lithography, comprising a substrate and a coating on the substrate having at least four layers, is proposed, wherein

Optical element

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Aalen, Germany

Oliver Gloeckl