Trumpf Lasersystems for Semiconductor Manufacturing Gmbh

Trumpf Lasersystems for Semiconductor Manufacturing Se

Oliver Erichson

Dieter Burger

Jonathan Mueller

Matthias Wecker

An optical assembly is for polarizing a laser beam. The optical assembly has a plurality of plate-shaped optical elements having a beam entry surface and a beam exit surface, and a holder configured to joint fix the plate-shaped optical elements. At least three spacers are arranged between each two adjacent ones of the plate-shaped optical elements. Each of the spacers is configured to provide punctiform contact with the respective beam exit surface of a first plate-shaped optical element, of the plate-shaped optical elements, and to provide punctiform contact with the respective beam entry surface of a second adjacent plate-shaped optical element, of the plate-shaped optical elements.

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Ditzingen, Germany

Oliver Erichson