Ifm Electronic Gmbh

Oliver Blankenhorn

Manfred Maurus

Peter Kimbel

Fabian Kuhnhäuser

The invention relates to a method for monitoring the function of a capacitive pressure measuring cell () comprising a measuring capacitor (C) and a reference capacitor (C) as well as a temperature element, wherein a pressure measurement value p is obtained by forming the quotient Q from the capacitance values of the reference capacitor (C) and the measuring capacitor (C). The method is characterized by the following method steps:

Method for monitoring the function of a capacitive pressure measuring cell

The invention relates to a capacitive pressure measuring cell for detecting the pressure of a medium adjacent to the pressure measuring cell, comprising a ceramic elastic measuring membrane, the first side of which at least partially contacts the medium and the second side of which facing away from the medium comprises a measuring electrode, and a ceramic cylindrical basic body disposed opposite to the second side of the measuring membrane and comprising at least one counter electrode which forms a measuring capacitance with the measuring electrode.

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Bodnegg, Germany

Oliver Blankenhorn