Brooks Automation Gmbh

Intermagnetics General Corporation-Polycold Systems, Inc.

Edwards Vacuum LLC

Oleg Podtcherniaev

Kevin P Flynn

Mikhail Boiarski

Tamirisa V V R Apparao

Paul Kevin Hall

Roger Lachenbruch

Vladimir Mogorichny

Aspects of the invention are found in a heat exchanger. The heat exchanger includes a fluid inlet manifold, a fluid outlet manifold, a plurality of heat transfer channels configured to communicate with the fluid inlet manifold and the fluid outlet manifold, and packing located within the fluid inlet manifold. Further aspects of the invention are found in a refrigeration system. The refrigeration system includes a compressor and at least one heat exchanger coupled to the compressor. The at least one heat exchanger includes a header, packing located in the header, and a heat transfer channel. The heat transfer channel is configured to receive fluid passing through the header and the packing.

Efficient heat exchanger for refrigeration process

Refrigerant freezeout is prevented, and temperature is controlled, by the use of a controlled bypass flow that causes a warming of the lowest temperature refrigerant in a refrigeration system that achieves very low temperatures by using a mixture of refrigerants comprising at least two refrigerants with boiling points that differ by at least 50&#xb0; C. This control capability enables reliable operation of the very low temperature system.

Methods of freezeout prevention and temperature control for very low temperature mixed refrigerant systems

Disclosed is a very low temperature or cryogenic refrigeration system with a scroll compressor and utilizing a mixed refrigerant that decreases refrigerant discharge temperature by refrigerant injection into the compressor.

Very low temperature refrigeration system having a scroll compressor with liquid injection

Disclosed is an ultra-low temperature, dual-compressor (), recirculating gas chilling system that includes a closed-loop mixed-refrigerant primary refrigeration system () in combination with a closed-loop gas secondary refrigeration loop (). The ultra-low temperature, dual-compressor (), recirculating gas chilling system disclosed is capable of providing continuous long term chilled gas and fast cooling of a high or ambient temperature object (), such as a chuck used in processing semiconductor wafers or any such device. The gas chilling system is characterized by three modes of operation: a normal cooling mode, a bakeout mode, and a post-bake cooling mode.

Ultra-low temperature closed-loop recirculating gas chilling system

Refrigerants containing R-22 are replaced with new blends by using R-125, or R-125 with R-124, or R-218, or R-218 with R-124, in place of R-22. No hardware or oil composition changes are required to maintain temperatures, pressures and capacity substantially unchanged in a refrigeration system.

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Odintsovo, Russia

Oleg Podtcherniaev