Applied Materials, Inc.

Olaff Steinke

Frank Stahr

Klaus Schade

Ulf Stephan

The present invention comprises an electrode arrangement for a coating device with a stationary first electrode () and a second movable electrode (), whose principle surfaces are opposing each other during coating, wherein the second electrode () may be moved along a plane parallel to the opposing principle surfaces, wherein at least one end face of an electrode running transversely to the principal surface an electrical shield () is provided, which extends at least partially parallel to the end face of one electrode, wherein at least one part () of the shield is formed so as to be movable.

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Radeberg, Germany

Olaff Steinke