Forschungsverbund Berlin E.v.

Olaf Krueger

Joachim Wuerfl

Wilfred John

Aziz Cayli

Tim Wernicke

Kerstin Oellers

Gerd Schoene

Kolja Hegel

Lars Kober

The invention relates to a method for producing vertical through-contacts (micro-vias) in semi-conductor wafers in order to produce semi-conductor components, i.e. contacts on the front side of the wafer through the semi-conductor wafer to the rear side of the wafer. The invention also relates to a method which comprises the following steps: blind holes on the contact connection points are laser drilled from the rear side of the wafer into the semi-conductor substrate, the wafer is cleaned, the semi-conductor substrate is plasma etched in a material selected manner until the active layer stack of the wafer is reached, the active layer stack of the wafer is plasma etched in a material selective manner until the contacts, which are to be connected to the rear side of the wafer, are reached, a plating base is applied to the rear side of the wafer and into the blind holes and gold is applied by electrodeposition onto the metallizied rear side of the wafer and the blind holes.

Method for producing through-contacts in semi-conductor wafers via production of through-plated holes

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Berlin, Germany

Olaf Krueger