Koninklijke Philips Corporation N.V.

Olaf Dannappel

Mareike K Klee

John Douglas Fraser

Hans-Peter Loebl

Georg Schmitz

Tilman Ulrich Schlenker

The invention relates to an array of ultrasound transducers which each comprise a substrate (), a membrane (), a first electrode (), a piezoelectric layer (), and a second electrode (), wherein the substrate () comprises at least one opening () which adjoins the membrane () at one side, while the piezoelectric layer () has a high piezoelectric coupling coefficient k and is textured. The invention further relates to an ultrasound transducer and to a method of manufacturing an array of ultrasound transducers.

Array of ultrasound transducers

The invention relates to an array of ultrasound transducers which each comprise a substrate ( ), a membrane ( ), a first electrode ( ), a piezoelectric layer ( ), and a second electrode ( ), wherein the substrate ( ) comprises at least one opening ( ) which adjoins the membrane ( ) at one side, while the piezoelectric layer ( ) has a high piezoelectric coupling coefficient k and is textured. The invention further relates to an ultrasound transducer and to a method of manufacturing an array of ultrasound transducers.

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Aachen, Germany

Olaf Dannappel