Memsic Transducer Systems Co., Ltd.

Aceinna, Inc.

Ohlan Silpachai

Yang Zhao

Francis Piu Man

Zhengxin Zhao

Nan Jou Pern

A flow sensing module with a bypass channel is provided. The flow sensing module may include a body portion and a flow sensor. The body portion may include a main fluid inlet, a main fluid outlet, a main fluid channel extending between the main fluid inlet and the main fluid outlet, a bypass fluid inlet and a bypass fluid outlet each configured to be in communication with the main fluid channel, and a bypass fluid channel extending between the bypass fluid inlet and the bypass fluid outlet. The flow sensor may be disposed in the bypass fluid channel to sense a flow rate of a fluid in the bypass channel. No pressure drop element is disposed in the main fluid channel, so the main fluid channel may have a pressure loss of a very small value. Moreover, linearity and sensitivity of the flow sensing module may also be improved.

Flow sensing module with bypass channel

A MEMS flow sensor is provided having a micro flow channel etched in a silicon structure composed of two silicon substrates bonded or fused together. A heater and one or more temperature sensors are, in one embodiment, disposed around the perimeter of the flow channel and outside of the channel. In another embodiment, a heater and one or more temperature sensors are respectively disposed outside the flow channel at the top and bottom of the channel. In further embodiments, a heater and one or more temperature sensors are located inside the flow channel on one or more surfaces thereof or around the inside perimeter of the channel. The flow sensors in accordance with the invention are preferably fabricated using wafer scale fabrication techniques.

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Newbury Park, CA, United States of America

Ohlan Silpachai