Samsung Electronics Co., Ltd.

Ohhyuk Kwon

Dongouk Kim

Dongjoon Lee

YoungBum Kim

Chaemook Lim

Woohee Kim

Yeongrack Son

Kwanghyeon Jeong

A process apparatus includes a heating module and a supporter disposed below the heating module. A process space is provided between the heating module and the supporter. The heating module includes a housing, at least one heating lamp disposed in the housing, at least one temperature sensor disposed in the housing, and a blocking plate disposed under the housing. The blocking plate spatially separates the at least one heating lamp from the process space, and the blocking plate includes at least one window spatially connecting the at least one temperature sensor to the process space.

Process apparatus including a non-contact thermo-sensor

Growing community of inventors

Suwon-si, South Korea

Ohhyuk Kwon