Alps Electric Co., Ltd.

Other

Organo Corporation

Frontec Incorporated

Oh Eui Yeol

Kenichi Mitsumori

Tadahiro Ohmi

Yasuhiko Kasama

Masayuki Toda

Akira Abe

Takashi Imaoka

Satoshi Miyazawa

Takayuki Imaoka

The wet treatment liquid feed nozzle of the invention comprises an introducing pathhaving an introducing porta discharging pathhaving a discharging porta crossing sectionformed by causing the introducing pathand the discharging pathto cross at the other ends thereof, a nozzle assemblyhaving an opening sectionopening to an object to be treatedprovided at the crossing sectionand pressure control meansfor controlling the difference between the pressure of the wet treatment liquid in contact with the object to be treatedand the atmospheric pressure provided at least on the discharging pathside so that the wet treatment liquid having been in contact with the object to be treatedvia the opening sectiondoes not flow to outside the discharging path

Liquid feed nozzle, wet treatment, apparatus and wet treatment method

The wet treatment liquid feed nozzle of the invention comprises an introducing path having an introducing port, a discharging path having a discharging port, a crossing section formed by causing the introducing path and the discharging path to cross at the other ends thereof, a nozzle assembly having an opening section opening to an object to be treated, provided at the crossing section, and pressure control means, for controlling the difference between the pressure of the wet treatment liquid in contact with the object to be treated and the atmospheric pressure provided at least on the discharging path side so that the wet treatment liquid having been in contact with the object to be treated via the opening section does not flow to outside the discharging path.

Liquid feed nozzle, wet treatment apparatus and wet treatment method

The wet treatment liquid feed nozzle of the invention comprises an introducing path,having an introducing port,a discharging path,having a discharging port,a crossing section,formed by causing the introducing path,and the discharging path,to cross at the other ends thereof, a nozzle assembly,having an opening section,opening to an object to be treated,provided at the crossing section,and pressure control means,for controlling the difference between the pressure of the wet treatment liquid in contact with the object to be treated,and the atmospheric pressure provided at least on the discharging path,side so that the wet treatment liquid having been in contact with the object to be treated,via the opening section,does not flow to outside the discharging path

An aqueous oxidizing acidic cleaning solution or an aqueous oxidizing alkaline cleaning solution is produced by mixing an acidic or alkaline solution with ozone water. An aqueous reducing acidic cleaning solution or an aqueous reducing alkaline cleaning solution is produced by mixing an acidic or alkaline solution with hydrogen water. Each of these aqueous cleaning solutions has effective cleaning power and the ORP and pH values thereof are separately controlled. Therefore, by selecting an appropriate aqueous cleaning solution according to the types of contaminants adhering to subjects during each manufacturing step, a plurality of types of contaminants can be removed by washing with one type of aqueous cleaning solution.

Cleaning method and apparatus for the same

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Kyongki-do, South Korea

Oh Eui Yeol