Applied Materials, Inc.

Applied Material, Inc.

Ofer Amir

Michael C Kuchar

Michael Robert Rice

Travis Morey

Adam J Wyatt

Paul Zachary Wirth

Sushant Suresh Koshti

Peter Reimer

Robert M McAndrew

Angela Rose Sico

Hannie Thi Vo

Kumaresan Kuppannan

Shawn Thanhson Le

Mainframe of dual-robot substrate processing system

Mainframe with integrated lid

Disclosed is a slit valve gate. The slit valve gate includes a base portion configured to couple to a slit valve actuator. The slit valve gate further includes a seal portion coupled to the base portion. The seal portion is configured to create an airtight seal between the slit valve gate and a sealing surface of a slit valve opening. The slit valve gate further includes a clamp portion coupled to the base portion. The clamp portion retains the seal portion at least partially between the clamp portion and the base portion.

Multi-piece slit valve gate

Mainframe of substrate processing system

Disclosed are a slit valve apparatus and a method for controlling a slit valve. The slit valve apparatus includes a slit valve assembly and a servo-control system in communication with the slit valve assembly. The slit valve assembly includes at least one gate able to transition between an open position and a closed position, at least one pneumatic actuator, at least one proportional pneumatic valve including a plurality of controllers, and a continuous position sensor. The servo-control system includes a centralized controller that generates a control signal and adjusts the movement of the at least one gate based on the position trajectory for the gate, a linear position measurement of the gate from the continuous position sensor, and fluid pressure/flow measurements from the plurality of controllers.

Slit valve pneumatic control

Disclosed is a wafer processing system, a dual gate system, and methods for operating these systems. The dual gate system may have a first gate, a second gate, a gate connector coupled to the first gate and to the second gate, and actuator coupled to the gate connector. The actuator is configured to seal the first gate against a first slot or open the first slot via vertical motion. The actuator is also configured to seal the second gate against a second slot or open the second slot via a combination of vertical motion and horizontal motion.

Dual gate and single actuator system

Growing community of inventors

Half Moon Bay, CA, United States of America

Ofer Amir