Orbotech Limited

Orbot Systems Ltd.

Oded Arnon

Eyal Teichman

Yigal Katzir

Avraham Gross

Idit Wechsler

Shabtai Negry

Illuminating apparatus for illuminating a workpiece during visual inspection thereof, including a first light source emitting light over a continuous angle of illumination toward the workpiece, blocking element arranged to block light over a portion of the continuous angle such that two portions of the illumination, separated by a blocked angle, illuminate the workpiece from the source, and a second light source arranged to illuminate the workpiece over the blocked angle.

Illuminator for inspecting substantially flat surfaces

Illuminator apparatus for illuminating a workpiece during visual testing thereof, the illuminator comprising: a source of illumination that illuminates a portion of the workpiece with on-axis illumination centered at a first angular direction and having a first intensity and with off-axis illumination having a second intensity; and an optical viewing system, that views said portion of the workpiece and accepts light reflected from the workpiece over a range of angular directions, centered at a second angular direction, said range of angular directions defining said on-axis illumination, wherein said first intensity and second intensity art separately adjustable and wherein the first angular direction is different from the second angular direction.

Optical inspection apparatus includes an illumination system illuminating an area of the workpiece surface with a sky of illumination which is, with respect to each point in the illuminated area, substantially circularly symmetric over a solid angle around the optical axis passing perpendicularly through the electro-optical sensor and the workpiece surface.

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Givatayim, Israel

Oded Arnon