Nxp B.v.

Nynke Verhaegh

Pim Theo Tuyls

Willem Frederik Adrianus Besling

Freddy Roozeboom

Martijn Goossens

Robertus A M Wolters

Johannes A J Van Geloven

The invention relates to an semi-conductor device comprising a first surface and neighboring first and second electric elements arranged on the first surface, in which each of the first and second elements extends from the first surface in a first direction, the first element having a cross section substantially perpendicular to the first direction and a sidewall surface extending at least partially in the first direction, wherein the sidewall surface comprises a first section and a second section adjoining the first section along a line extending substantially parallel to the first direction, wherein the first and second sections are placed at an angle with respect to each other for providing an inner corner wherein the sidewall surface at the inner corner is, at least partially, arranged at a constant distance R from a facing part of the second element for providing a mechanical reinforcement structure at the inner corner.

Robust high aspect ratio semiconductor device

The invention relates to a tamper-resistant semiconductor device comprising a substrate () comprising an electronic circuit arranged on a first side thereof. An electrically-conductive protection layer () is arranged on a second side of the substrate () opposite to the first side. At least three through-substrate electrically-conductive connections () extend from the first side of the substrate () into the substrate () and in electrical contact with the electrically-conductive protection layer () on the second side of the substrate (). A security circuit is arranged on the first side connected to the through-substrate electrically-conductive connections () and is arranged for measuring at least two resistance values (R, R, R, R, R, R) of the electrically-conductive protection layer () through the through-substrate electrically-conductive connections (). The security circuit is further arranged for comparing the measured resistance values (R, R, R, R, R, R) with reference resistance values.

Tamper-resistant semiconductor device and methods of manufacturing thereof

Growing community of inventors

Arnhem, Netherlands

Nynke Verhaegh