Taiwan Semiconductor Manufacturing Comp. Ltd.

Samsung Electronics Co., Ltd.

Nuo Xu

Zhiqiang Wu

Jing Wang

Woosung Choi

Sai-Hooi Yeong

Yu-Ming Lin

Meng-Han Lin

Feng-Cheng Yang

Bo-Feng Young

Han-Jong Chia

Wen-Hsing Hsieh

Po-Sheng Lu

Yuan-Hao Chang

Zhengping Jiang

Weiyi Qi

Ji-Ting Li

Yuan Hao Chang

Wei Cheng Wu

Chien-Min Lee

Shy-Jay Lin

Yang Lu

Ming-Yuan Song

Fang-Lan Chu

Yen-Lin Huang

Yuan-Jen Lee

Jongchol Kim

Fan Chen

Harry-Haklay Chuang

In an embodiment, a method includes: receiving a first wafer and a second wafer, the first wafer including a first alignment mark, the first alignment mark including a first grid of first magnetic features, the second wafer including a second alignment mark, the second alignment mark including a second grid of second magnetic features; aligning the first alignment mark with the second alignment mark in an optical alignment process; after the optical alignment process, aligning the first alignment mark with the second alignment mark in a magnetic alignment process, north poles of the first magnetic features being aligned with south poles of the second magnetic features, south poles of the first magnetic features being aligned with north poles of the second magnetic features; and forming bonds between the first wafer and the second wafer.

Wafer bonding method and bonded device structure

A memory device including a word line, a source line, a bit line, a memory layer, a channel material layer is described. The word line extends in a first direction, and liner layers disposed on a sidewall of the word line. The memory layer is disposed on the sidewall of the word line between the liner layers and extends along sidewalls of the liner layers in the first direction. The liner layers are spaced apart by the memory layer, and the liner layers are sandwiched between the memory layer and the word line. The channel material layer is disposed on a sidewall of the memory layer. A dielectric layer is disposed on a sidewall of the channel material layer. The source line and the bit line are disposed at opposite sides of the dielectric layer and disposed on the sidewall of the channel material layer. The source line and the bit line extend in a second direction perpendicular to the first direction. A material of the liner layers has a dielectric constant lower than that of a material of the memory layer.

Memory device and manufacturing method thereof

The present disclosure provides a method for topography simulation of a physical structure under a topography-changing process. The method includes initializing a voxel mesh as a three-dimensional (3D) representation of the physical structure, generating a batch of particles, simulating a flight path of at least one of the particles with a ray-tracing method, identifying a voxel unit in the voxel mesh that intersects the flight path, determining a surface reaction between the one of the particles and the voxel unit, and adding an extra voxel unit adjacent to the voxel unit based on the determining of the surface reaction.

Semiconductor topography simulation of non-removal type processes

A memory device includes a substrate, a spin-orbit torque (SOT) layer, a magnetic tunneling junction (MTJ) film stack, a connecting via and a shielding structure. The SOT layer is disposed on the substrate. The MTJ film stack is formed over SOT layer and on the substrate. The connecting via is disposed on and electrically connected to the MTJ film stack. The shielding structure is laterally surrounding the MTJ film stack and disposed on the SOT layer, wherein the shielding structure includes a first dielectric layer, a high magnetic permeability layer and a second dielectric layer, the first dielectric layer is in contact with the SOT layer and the MTJ film stack, and the high magnetic permeability layer is sandwiched between the first dielectric layer and the second dielectric layer.

Memory device and method of fabricating the same

A method for forming a semiconductor memory structure includes following operations. A plurality of doped regions are formed in a semiconductor substrate. The doped regions are separated from each other. A stack including a plurality of first insulating layers and a plurality of second insulating layers alternately arranged is formed over the semiconductor substrate. A first trench is formed in the stack. The second insulating layers are replaced with a plurality of conductive layers. A second trench is formed. A charge-trapping layer and a channel layer are formed in the second trench. An isolation structure is formed to fill the second trench. A source structure and a drain structure are formed at two sides of the isolation structure.

Method for forming semiconductor memory structure

A method includes: providing a substrate including a planar portion and a mesa portion over the planar portion; depositing an oxide layer over the mesa portion; depositing a ferroelectric material strip over the oxide layer and aligned with the mesa portion; and depositing a gate strip crossing the ferroelectric material strip and over the oxide layer.

Method of manufacturing semiconductor device and associated memory device

The present disclosure provides a method for topography simulation of a physical structure under a topography-changing process. The method includes initializing a voxel mesh as a three-dimensional (3D) representation of the physical structure, generating a batch of particles, simulating a flight path of one of the particles with a ray-tracing method by a parallel processing thread in a hardware accelerator, identifying a surface normal of a voxel unit in the voxel mesh that intersects the flight path by the parallel processing thread, determining a surface reaction between the one of the particles and the voxel unit by a central processing unit (CPU), and updating the voxel mesh based on the determining of the surface reaction.

System and method for semiconductor topography simulations

A semiconductor package, a semiconductor device and a shielding housing for a semiconductor package are provided. The semiconductor package includes a semiconductor chip having a first region and a second region beside the first region; and a shielding housing encasing the semiconductor chip, made of a magnetic permeable material, and including a first shielding plate, a second shielding plate opposite to the first shielding plate and a shielding wall extending between the first shielding plate and the second shielding plate. The first shielding plate has an opening exposing the first region and includes a raised portion surrounding the opening and a flat portion beside the raised portion and shielding the second region. A first distance from a level of the semiconductor chip to an outer surface of the raised portion is greater than a second distance from the level to an outer surface of the flat portion.

Semiconductor package, semiconductor device and shielding housing of semiconductor package

A method includes providing a substrate including a channel region, the substrate comprising a two-stage structure having a first surface, a second surface higher than the first surface and a third surface connected between the first surface and the second surface; covering the substrate from a top thereof with an oxide layer; forming a ferroelectric material strip on a topmost surface of the oxide layer; and forming a gate strip covering the ferroelectric material strip and the oxide layer from a top of the gate strip.

A semiconductor memory structure includes a substrate, two doped regions in the substrate, a plurality of gate layers, a plurality of insulating layers, a column over the substrate, a charge-trapping layer, and a channel layer. The substrate includes dopants of a first conductivity type, and the two doped regions include dopants of a second conductivity type complementary to the first conductivity type. The gate layers and the insulating layers are alternately stacked over the substrate. The column penetrates the gate layers and the insulating layers, and includes an isolation structure, a source structure and a drain structure. at two sides of the isolation structure. The charge-trapping layer is at two sides of the column, and the channel layer is between the charge-trapping layer and the column. A bottom surface of the charge-trapping layer is in contact with the substrate and separated from the two doped regions.

Semiconductor memory structure and method for forming the same

A method of manufacturing a semiconductor device is disclosed. The method includes providing a substrate including a channel region for conducting current; shaping the substrate to form a protruding plane, a bottom plane and a side plane connected between the protruding plane and the bottom plane for the channel region; forming an oxide layer covering the channel region; forming a ferroelectric material strip, extending in a first direction, on a protruding plane of the oxide layer; and forming a gate strip, extending in a second direction orthogonal with the first direction, on the ferroelectric material strip and a side plane and a bottom plane of the oxide layer.

A system for reconstructing wafer maps of semiconductor wafers includes: a processor; and memory having instructions stored thereon that, when executed by the processor, cause the processor to: receive test data of a wafer at sparse sampling locations of the wafer, the sparse sampling locations being selected based on a probing mask; and compute a reconstructed wafer map by performing compressed sensing with Zernike polynomials on the test data at sparse locations of the wafer.

Systems and methods for wafer map analysis

A memory device, including: memory cells, first conductive lines, second conductive lines, third conductive lines and fourth conductive lines. The memory cells are arranged in an array. Each memory cell includes a transistor and a capacitor connected to a gate terminal of the transistor in series. The first conductive lines extend in a first direction. Each first conductive line connects to gate terminals of transistors arranged in same column in the array. The second conductive lines extend in the first direction. Each second conductive line connects to source terminals of transistors arranged in same column in the array. The third conductive lines extend in the first direction. Each third conductive line connects to drain terminals of transistors arranged in same column in the array. The fourth conductive lines extend in a second direction. Each fourth conductive line couples to the capacitor arranged in same row in the array.

Growing community of inventors

Milpitas, CA, United States of America

Nuo Xu