Applied Materials, Inc.

Nunzio V Carbone

Bon-Woong Koo

Peter Ewing

Ajdin Sarajlic

Frank Sinclair

Svetlana Radovanov

Christopher A Rowland

Ronald Johnson

You Chia Li

Mervyn Deegan

A method for improving the beam current for certain ion beams, and particularly germanium and argon, is disclosed. The use of argon as a second gas has been shown to improve the ionization of germane, allowing the formation of a germanium ion beam of sufficient beam current without the use of a halogen. Additionally, the use of germane as a second gas has been shown to improve the beam current of an argon ion beam.

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Provided herein are approaches for increasing efficiency of ion sources. In some embodiments, an apparatus, such as an ion source, may include a chamber housing having a first end wall and a second end wall, and an extraction plate coupled to at least one of the first end wall and the second end wall. The extraction plate may include an extraction aperture. The apparatus may further include a tubular cathode extending between the first end wall and the second end wall.

Ion source with tubular cathode

GeH/Ar plasma chemistry for ion implant productivity enhancement

Growing community of inventors

Hamilton, MA, United States of America

Nunzio V Carbone