Seiko Epson Corporation

Seiko Espon Corporation

Seiko Epson Company

Nozomu Hirokubo

Akira Sano

Yasushi Matsuno

Teruyuki Nishimura

Daisuke Saito

Satoshi Fujisawa

Tomonori Matsushita

Tsukasa Funasaka

Kazunori Sakurai

Koji Kitahara

Katsuji Arakawa

Hiroshi Komatsu

Takashi Nagate

Seiji Yamazaki

Hideaki Kasahara

Variable wavelength filter including two reflective films facing each other and an actuator group for changing a relative position between the two reflective films is controlled. The actuator group includes a first actuator that is driven according to a target distance between the two reflective films and a second actuator in which a feedback control is performed according to the target distance and a detection value of a distance between the two reflective films. Control method includes (a) receiving a new target distance between the two reflective films, (b) driving the first actuator according to the new target distance, and (c) performing the feedback control on the second actuator according to the new target distance and the detection value of the distance between the two reflective films. When a predetermined condition is satisfied, after start of the (b), and after elapse of a predetermined inhibition time, the (c) is started.

Variable wavelength filter, variable wavelength filter control method, and non-transitory computer-readable storage medium storing computer program

Provided is a spectrometry method that includes (a) identifying a common feature between a first spectral image and at least one second spectral image other than the first spectral image of a plurality of spectral images acquired by an imaging element, (b) detecting a relative position shift amount between the first spectral image and the second spectral image, and (c) aligning the first spectral image and the second spectral image based on the relative position shift amount being detected. The aligning of (c) includes correcting a position of the second spectral image with respect to a position of the first spectral image based on the common feature.

Spectrometry method, spectrometry system, and computer program

A spectral apparatus includes: an interference filter that includes a pair of reflection films and outputs light having a spectral wavelength corresponding to a gap size between the pair of reflection films; a gap sensor that detects the gap size; and one or more processors configured to detect an error based on a difference between the spectral wavelength corresponding to the gap size detected by the gap sensor and a target wavelength of light to be output from the interference filter. The one or more processors detect an error when an integration value obtained by integrating, on a time axis, an absolute value of the difference exceeds a threshold value.

Spectral apparatus and method of driving spectral apparatus

An optical device includes an optical member having a plurality of first optical layers and a plurality of second optical layers having a refractive index different from that of the first optical layer in which the first optical layers and the second optical layers are laminated, and a layer thickness changing electrode that changes a thickness of the first optical layer in a lamination direction of the first optical layers and the second optical layers, in which the optical member is provided in a pair, and the pair of optical members is disposed to face each other through a gap, and a gap changing driver that changes a dimension of the gap.

Optical device and electronic device

An actuator drive apparatus according to a first aspect includes a first member, a second member that faces the first member via a gap, a gap sensor that detects a dimension of the gap, a first actuator that changes the dimension of the gap through input of a first voltage signal, and a second actuator that changes the dimension of the gap through input of a second voltage signal, in which the first voltage signal is a voltage signal that becomes a constant bias voltage after a lapse of a predetermined time, and includes an overshoot signal larger than the bias voltage before the lapse of the predetermined time, and the second voltage signal is a voltage signal that is feedback-controlled so that a detection value detected by the gap sensor approaches a target value.

Actuator drive apparatus and method for controlling actuator drive apparatus

An optical filter device includes a wavelength variable interference filter that includes a pair of reflective films which face each other, and a fixed substrate in which one of the pair of reflective films is provided; a base to which the fixed substrate is fixed; and a fixing member which fixes one place on the fixed substrate to the base, a surface which is on other place of the one place of the substrate and the base are disposed with a gap therebetween.

Optical filter device, optical module, and electronic apparatus

A spectroscopic measurement apparatus includes a fixed substrate, a movable substrate, and a wavelength variable interference filter which includes an electrostatic actuator for changing the gap dimension between the substrates, a vibration disturbance detection unit which detects vibration added to the wavelength variable interference filter, and a bias driving unit which applies a feed-forward voltage based on a detected value of the vibration disturbance detection unit to the electrostatic actuator.

MEMS driving device, electronic apparatus, and MEMS driving method

An optical module includes a wavelength variable interference filter having a fixed reflective film, a movable reflective film which faces the fixed reflective film with a gap between reflective films interposed therebetween, and an electrostatic actuator that changes the gap between reflective films, and a gap control unit that controls the electrostatic actuator. The gap control unit controls the electrostatic actuator on the basis of an order which is set in accordance with a wavelength to be measured, and changes the gap between the reflective films.

Optical module, electronic device, and driving method

An optical filter device includes a wavelength variable interference filter that has a fixed substrate provided with a fixed reflective film and a movable substrate provided with a movable reflective film, a casing that has an inner space for storing the wavelength variable interference filter therein, and a fixation portion that fixes the wavelength variable interference filter to the casing. In addition, the fixation portion is provided between a side surface of the fixed substrate and an inner surface of the casing.

Optical filter device, optical module, electronic apparatus, and MEMS device

An actuator apparatus includes a pair of substrates facing each other; a plurality of bias actuators that each vary a gap dimension of a gap between the pair of substrates; a gap detection portion that detects the gap dimension; and a voltage control unit that controls driving of each of the bias actuators on the basis of the detected gap dimension. The bias actuators are located asymmetric relative to a driving central axis and are mutually independently driven; and the voltage control unit derives driving parameters for use in driving the bias actuators, on the basis of voltages and gap dimensions obtained by sequentially switching and driving the bias actuators on by one.

Actuator apparatus, electronic device, and control method

A spectroscopic apparatus includes: a spectroscopic module; a temperature detector that detects a temperature of the spectroscopic module; and a module controller that controls the spectroscopic module, in which the spectroscopic module includes an interference filter that has a gap changing unit which changes a dimension of a gap between a pair of reflection films, and a capacity detection circuit that outputs a detection signal in accordance with an electrostatic capacity between the pair of reflection films, and in which the module controller corrects a target value of the detection signal that is output from the capacity detection circuit, based on a temperature characteristic of the spectroscopic module and a detection temperature that is detected by the temperature detector, and controls the voltage that is to be applied to the gap changing unit, that the detection signal that is output from the capacity detection circuit is the corrected target value.

Spectroscopic apparatus, temperature characteristic derivation apparatus, spectroscopic system, spectroscopy method, and temperature characteristic derivation method

An optical filter device includes a wavelength variable interference filter that includes a pair of reflective films which face each other, and a fixed substrate in which one of the pair of reflective films is provided; a base to which the fixed substrate is fixed; and a fixing member which fixes one place on the fixed substrate to the base, a surface which is on other place of the oneplace of the substrate and the base are disposed with a gap therebetween.

A color measurement apparatus includes a color measurement portion, a carriage, and a movement mechanism the color measurement portion starts color measurement after a predetermined initialization process, a moving section between patches from a point Pto a point Poverlaps an initialization section where the spot moves at the time of performing the initialization process, and the moving section between the patches is a section between a forward point having a distance as a radius of the spot with respect to the X direction and a backward point having a distance as a radius of the spot with respect to the X direction, based on a boundary of the patches.

Wavelength variable interference filter and driving method of the wavelength variable interference filter

A variable wavelength interference filter is fixed to the base, and the fixing material fixes at least one of the substrates to the base via at least one location of one surface side along a substrate thickness direction. A first order resonance frequency of the variable wavelength interference filter in which a fixing position of the fixing material is used as a fixed end is less than or equal to half a value of a first order resonance frequency of the movable section.

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Fujimi, Japan

Nozomu Hirokubo