Azbil Corporation

Nozomi Kida

Tomohisa Tokuda

Hirofumi Tojo

Masayuki Yoneda

Ayumi Tsushima

Yuki Seto

Yoshiyuki Ishikura

Ayumi Tushima

A sensor element includes a sensor chip and a diaphragm base joined to a surface of the sensor chip. The sensor chip includes a first diaphragm for measuring differential pressure between a first pressure and a second pressure and a second diaphragm for measuring absolute pressure or gage pressure of the second pressure. The diaphragm base includes a third diaphragm to directly receive a fluid that is a measurement target and has the first pressure, and a fourth diaphragm to directly receive a fluid that is a measurement target and having the second pressure. The sensor element has a liquid amount adjustment chamber to make an amount of a first pressure transmission medium filled in a first pressure introduction path and an amount of a second pressure transmission medium filled in a second pressure introduction path to be equal to each other.

Sensor device with multiple simultaneous pressure measurements

A sensor chip of a sensor element includes a diaphragm for measuring a differential pressure between a first pressure and a second pressure, a diaphragm for measuring an absolute pressure or a gauge pressure of the second pressure, a first pressure introduction path that transmits the first pressure to the diaphragm for measuring a differential pressure, and a second pressure introduction path that transmits the second pressure to the diaphragms. When the transmission of the first pressure or the second pressure to the diaphragms is indicated by an equivalent circuit, a path for transmitting the first pressure and a path for transmitting the second pressure are symmetrically formed.

Pressure sensor element for measuring differential pressure and a diaphragm base having a set of diaphragms displaced by receiving pressures where a set of pressure inlet passages respectively transmit different pressures to the set of diaphragms

A differential pressure gauge of the invention contains: a diaphragm layer disposed between first and second parts; and a wall between a first region on a pressure-receiving portion side and a second region on a first through-hole side within a second pressure chamber. The diaphragm layer covers the pressure-receiving portion over a first pressure chamber and has the first through-hole with one end disposed in the second pressure chamber away from the pressure-receiving portion. The wall is disposed with gaps formed from inner walls of the second pressure chamber. The first pressure chamber is formed through the first part, the second pressure chamber has an opening facing the diaphragm layer, the first part has a second through-hole continuing to the first through-hole, and a base has a third through-hole with one end disposed in the first pressure chamber and a fourth through-hole continuing to the second through-hole.

Differential pressure gauge with improved signal-to-noise ratio suppression

A curved recess in a stopper includes a groove-pattern region and a groove-free region. When a sensor diaphragm reaches a bottom of the curved recess in the stopper, a groove-free region is divided into a ring-shaped first region with which a sensor diaphragm is in close contact and a ring-shaped second region disposed between an inner wall surface of a ring-shaped wall and the ring-shaped first region. The first region serves as a sealing region and the second region serves as a confinement region so that a pressure transmitting medium that remains in a space adjacent to the inner wall surface of the ring-shaped wall is confined in the confinement region, and abnormal deformation of the sensor diaphragm is prevented.

Pressure sensor chip

A sensor chip () is joined to an inner wall surface () of a base body (-), with a lower surface () of a first retaining member (-) serving as a joint surface, in such a manner as to allow an enclosing chamber () (including a pressure receiving chamber (-) and a pressure guiding passage (-)) between a pressure receiving diaphragm () and the joint surface () of the sensor chip () to communicate with a pressure guiding hole (-) in the first retaining member (-). In this state, a narrow tube () made of stainless steel is passed through the pressure guiding passage (-) in the base body (-) and inserted and secured in the pressure guiding hole (-) in the first retaining member (-). This reduces the pressure receiving area of a pressure guiding passage that guides a pressure (P) of a measured fluid to a first surface (-) of a sensor diaphragm (-), suppresses force applied in the direction of separating the joint between the sensor chip () and the base body (-), and makes it possible to use a soft adhesive.

Pressure sensor

A pressure sensor comprising: a sensor chip; a differential pressure diaphragm provided in the center portion of the sensor chip; a differential pressure gauge provided in the differential pressure diaphragm; a static pressure diaphragm provided at the outer peripheral portion of the differential pressure diaphragm; a first static pressure gauge formed at an edge portion of the static pressure diaphragm; and a second static pressure gauge formed at a center portion of the static pressure diaphragm.

Pressure sensor having a diaphragm

A pressure sensor including a sensor chip; a differential pressure diaphragm provided in the center portion of the sensor chip; a first differential pressure gauge formed along a radial direction relative to the center of the differential pressure diaphragm, provided on a first edge of the differential pressure diaphragm; a second differential pressure gauge formed along a circumferential direction, which is perpendicular to the radial direction, provided in the vicinity of the first differential pressure gauge on the first edge of the differential pressure diaphragm; and a static pressure diaphragm disposed between an edge portion of the sensor chip and one of the edges, other than the first edge, of the differential pressure diaphragm, provided to the outside of the differential pressure diaphragm.

Growing community of inventors

Chiyoda-ku, Japan

Nozomi Kida