Mks Instruments, Inc.

Nouna Kettaneh

Ron Hadar

Lawrence Hendler

Svante Bjarne Wold

Uzi Levami

Stela Diamant Lazarovich

Dmitry Perlroizen

A method for creating a new model of a manufacturing process according to a multivariate analysis including selecting a set of data representative of multidimensional data measured during a step or phase of a manufacturing process. The method also includes determining a set of model generation conditions based on the set of data and generating the new model specifying intervals for the multidimensional data measured during a future manufacturing process based on the set of model generation conditions.

Automated model building and batch model building for a manufacturing process, process monitoring, and fault detection

A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.

Automated model building and model updating

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Hollis, NH, United States of America

Nouna Kettaneh