Hitachi, Ltd.

Renesas Technology Corp.

Hitachi Automotive Systems, Ltd.

Other

Yokogawa Electric Corporation

Hitachi High-tech Corporation

Elpida Memory, Inc.

Hitachi Astemo Ltd.

Noriyuki Sakuma

Yoshio Homma

Seiichi Kondo

Atsushi Isobe

Yuudai Kamada

Chisaki Takubo

Kenichi Takeda

Kenji Hinode

Takashi Shiota

Kiichiro Mukai

Yasushiro Nishioka

Tomonori Sekiguchi

Naofumi Ohashi

Toshinori Imai

Hiroshi Shinriki

Takeshi Kimura

Yasuo Onose

Hiroki Nezu

Hiroshi Fukuda

Hiroshi Nakano

Takashi Oshima

Naoki Yamamoto

Yoshitaka Sasago

Shuntaro Machida

Nobuo Owada

Aritoshi Sugimoto

Hizuru Yamaguchi

Norio Ishitsuka

Daisuke Ryuzaki

Takeshi Furusawa

Youhei Yamada

Masaaki Fujimori

Nobuyuki Mise

Yuki Furubayashi

Ryou Yoneyama

Keiji Hanzawa

Hiroyuki Uchiyama

Keiji Watanabe

Haruo Akahoshi

Takeo Shiba

Daisuke Kodama

Shinobu Tashiro

Seiichi Watanabe

Shinichi Saito

Masahiro Aoki

Tatsuyuki Saito

Keiichi Higeta

Katsumi Ogiue

Tatemi Ido

Takeyuki Itabashi

Masahiko Takahashi

Ryosuke Doi

Takashi Tsutsumi

Masaharu Kinoshita

Noriyuki Homma

Kazuo Ono

Hideo Arimoto

Kunihiko Yamaguchi

Akihisa Uchida

Yuko Hanaoka

Jiro Yamamoto

Naoyuki Harada

Ichiro Mitamura

Kazutoshi Okamoto

Kinji Tsunenari

Hiroshi Yuhara

Yukinori Kasajima

Hideki Sano

Shuji Katsuoka

Kiyofumi Miyahara

Mayumi Tamura

Munenori Degawa

The present invention aims to provide a fuel battery system improved in reliability by accurately detecting when a fuel electrode gas or an air electrode gas has leaked. A fuel battery cell according to the present invention includes a first electrode, an electrolyte membrane, and a second electrode which are layered on a support substrate. Further, at least any one of the first electrode, the electrolyte membrane, and the second electrode is electrically isolated by an insulating member to form a first region and a second region. The insulating member is disposed at a position where the insulating member does not overlap with an opening portion of the support substrate (refer to FIG.).

Fuel battery cell, fuel battery system, leak detection method

Provided is a highly reliable fuel cell that improves power generation efficiency of the fuel cell and that is less likely to cause damage to an electrode and an electrolyte film. The fuel cell includes a support substrate () having a region in which a support portion having a mesh-like shape in a plan view is provided, a first electrode 4 on the support substrate, an electrolyte filmon the first electrode, and a second electrodeon the electrolyte film. The first electrode includes a first thin film electrodeA formed in a manner of covering at least the region, and a first mesh-like electrodeB connected to the first thin film electrode and provided corresponding to the support portion. The first mesh-like electrodeB has a film thickness larger than that of the first thin film electrode and has a mesh-like shape in a plan view.

Fuel cell

Provided are acceleration sensor, geophone and seismic prospecting system with high sensitivity and low power consumption. The acceleration sensor includes a mass body displaceable with respect to a rotation shaft. The acceleration sensor includes a first AC servo control facing a first symmetrical region of the first movable portion, a second AC servo control electrode facing a second symmetrical region of the second movable portion, and a DC servo control electrode facing an asymmetrical region of the second movable portion. A first AC servo capacitive element is formed by the first movable portion and the first AC servo control electrode, a second AC servo capacitive element is formed by the second movable portion and the second AC servo control electrode, and a DC servo capacitive element is formed by the second movable portion and the DC servo control electrode.

Acceleration sensor, geophone, and seismic prospecting system

Provided is an acceleration sensor having a large mass in a movable portion, and realizing high impact resistance. An acceleration sensor elementincludes an upper substrate, a lower substratespaced apart from the upper substrate, and an intermediate substrateprovided between the upper substrateand the lower substrate. Each of a first movable portion, a second movable portion, a frame portion, a fixed portion, and a spring portionconstituting the intermediate substrateis configured with two layers of an upper layer and a lower layer, and a stopper portionis provided at one end of the frame portion. A distancebetween an end portion of the first movable portionor the second movable portionand an end portion of the stopper portionin the upper layer and a distancebetween an end portion of the first movable portionor the second movable portionand an end portion of the stopper portionin the lower layer are different from each other.

Acceleration sensor

An acceleration sensor has high sensitivity, low power consumption and high linearity of output to the applied acceleration under gravity. To solve the above problem, the acceleration sensor is provided with a movable section placed between a base substrate and a cap substrate and rotating about a rotation axis. A top left electrode included in the cap substrate and a left movable electrode included in the movable section form a left capacitor, and a top right electrode included in the cap substrate and a right movable electrode included in the movable section form a right capacitor. Then, a lateral width of a first detection region in which capacitance is detected between the top left electrode and the left movable electrode, and a lateral width of a second detection region in which capacitance is detected between the top right electrode and the right movable electrode are different from each other.

In an acceleration sensor detecting a vibration acceleration by using torsion of a beam joining a fixed portion and a membrane, a spring constant of the beam is decreased while an increase in a chip size due to extension of the beam is prevented, so that an acceleration sensor that is highly sensitive and small in a size is provided with a low price. A sensor of a capacitance detecting type includes a membrane having a stacking structure formed of two or more layers and a plurality of beams capable of twisting so that the membrane is movable in a detecting direction, a first beam of the plurality of beams is formed of the same layer as either an upper or a lower layer of the membrane, and a second beam thereof is formed of the same layer as either an upper or a lower layer of the movable portion.

There is provided an acceleration sensor with low noise and high sensitivity. Specifically, a first number of opening portions are formed in a region corresponding to a heavyweight section of a mass body, on a surface of a membrane layer, and a second number of opening portions are formed in a region corresponding to the heavyweight section of the mass body, on a back surface of the membrane layer. The opening portion and the opening portion are connected to each other to form a plurality of through portions on the membrane layer, and the first number is larger than the second number.

An acceleration sensor with an improved membrane (mass body) is provided. The membrane includes a moving portion, a moving portion electrically separated from the moving portion, and a mechanical junction portion that mechanically connects the moving portion and the moving portion in a y-axis direction. The mechanical junction portion includes a first portion extending in a direction having a first angle with respect to the y-axis direction and a second portion extending in a direction having a second angle different from the first angle with respect to the y-axis direction in an xy plane, and is formed to have a non-linear shape in an x-axis direction. The acceleration sensor with improved the membrane stably operates by reducing a variation in a capacity value of a detection electrode and has an excellent noise characteristic.

Acceleration sensor including improved mass body

An acceleration sensor () includes a fixed portion (), a movable portion () connected to the fixed portion (), a lower electrode () that is disposed to face a lower surface of the movable portion (), and an upper electrode () that is disposed to face an upper surface of the movable portion (). A distance in an x-axis direction between an end portion () of the lower electrode () and the fixed portion () is shorter than a distance in the x-axis direction between an end portion () of the upper electrode () and the fixed portion (). Further, a distance in the x-axis direction between an end portion () of the lower electrode () and the fixed portion () is shorter than a distance in the x-axis direction between an end portion () of the upper electrode () and the fixed portion ().

There is provided an inertia sensor with low noise and high sensitivity. The inertia sensor captures a physical quantity as a change of electrostatic capacitance and detects the physical quantity based on a servo voltage generating electrostatic force that cancels the change of the electrostatic capacitance. The inertia sensor includes a detection capacitor unit that captures the physical quantity as the change of the electrostatic capacitance and a servo capacitor unit to which the servo voltage is applied. Here, the detection capacitor unit and the servo capacitor unit are connected mechanically through an insulation material.

Inertia sensor with improved detection sensitivity using servo voltage to detect a physical quantity

Airtightness in a cavity of an inertial sensor (acceleration sensor) is increased to achieve high sensitivity. In the acceleration sensor having movable electrodes VE, VEand fixed electrodes FE, FE, the fixed electrodes are formed by portions surrounded by a through hole THprovided in a cap layer CL, and the through hole is filled with an insulating film IFand polysilicon P and has a wide portion (WP). The wide portion has a gap SP that is not filled with the insulating film IFand the polysilicon P, and the gap SP is filled with the interlayer insulating film ID. With such a configuration, degassing can be exhausted through the gap (airway) SP in a pressure reducing step.

Inertia sensor and method of manufacturing the same

Degradation of reliability of a thermal fluid flow sensor, caused by generation of a crack in an insulating film is prevented in the thermal fluid flow sensor including a detection section and a circuit section formed on the same substrate when stress adjustment is performed by forming a deep concave portion in an interlayer insulating film in the detection section and forming the insulating film having a tensile stress thereon. As a means thereof, stair-like step is provided in a side wall of a concave portion, formed in the interlayer insulating film on a diaphragm. Accordingly, each depth of a first concave portion and a second concave portion, which form the concave portion, is reduced, and coatability of the insulating film for the stress adjustment, which covers a side wall and a bottom face of the concave portion, is improved.

Thermal fluid flow sensor

A manufacturing method of a MEMS sensor includes a step of, by irradiating a first hole formed in a second layer on a semiconductor substrate with a focused ion beam for a first predetermined time, forming a first sealing film, which seals the first hole, on the first hole, and a step of, by irradiating a second hole formed in the second layer with a focused ion beam for a second predetermined time, forming a second sealing film, which seals the second hole, on the second hole. At this time, each of the first predetermined time and the second predetermined time is a time in which thermal equilibrium of the second layer is maintainable, and the step of forming the first sealing film and the step of forming the second sealing film are performed repeatedly.

Manufacturing method of MEMS sensor

A low-noise and high-sensitivity inertial sensor is provided. On the assumption that a movable portion VUand a movable portion VUare formed in the same SOI layer, the movable portion VUand the movable portion VUare mechanically connected to each other by a mechanical coupling portion MCU even while these movable portions are electrically isolated from each other. Thereby, according to a sensor element SE in the invention, it is possible to further suppress a shift between the capacitance of a MEMS capacitorand the capacitance of a MEMS capacitor

Inertial sensor

A thermal type sensor molded from a mold resin having an opening has a problem in that the residual stress of the mold resin in the opening causes peeling at the interface having poor adhesion. A physical quantity sensor has a construction having a semiconductor chip having a detector unit, a frameon which the semiconductor chip is mounted, a mold resin portionwhich encapsulates the semiconductor chip and the frame and has an opening through which the detector unit is exposed to the outside, and a stress absorbing layerwhich is formed between an end of the opening in the mold resin portion and a wiring layer formed in the detector unit, and which is formed from a metal material that absorbs a stress from the end.

Physical quantity sensor

Growing community of inventors

Kodaira, Japan

Noriyuki Sakuma