Mitsubishi Denki Kabushiki Kaisha

Noriyuki Mizuta

Takashi Yamamoto

Tadatoshi Yamada

Akira Ishimori

Takayuki Inoue

Tatsuya Iwasa

An apparatus for analyzing in a mass spectrograph ions contained in gas emitted from a sample upon application of a laser beam spot to the surface of the sample, the apparatus including a vacuum vessel which houses the mass spectrograph therein, a support structure which supports the sample outside the vacuum vessel, a first laser irradiation device for applying a first laser beam to the surface of the sample, and a second laser irradiation device for applying a second laser beam to the flow of gas generated from the sample and flowing toward the mass spectrograph in the vacuum vessel through a nozzle provided in the same vessel.

Growing community of inventors

Hyogo, Japan

Noriyuki Mizuta