S-tec Corporation

Noriyuki Kimura

Masao Yamaguchi

Hiroshi Mihira

Kouichi Ishikawa

Kiyoshi Satoh

A mass flow meter includes a housing body having a fluid passageway extending therethrough with a capillary tube communicating with the fluid passageway. The capillary tube is connected through a pair of metallic sleeves mounted on a base member which in turn is fastened to the housing body. A pair of sensor coils is connected to the capillary tube to measure any fluid flow. A metal sensor case is welded airtight to the base member to encapsulate the capillary tube.

Mass flowmeter with hermetically sealed housing

A part of a tube, through which a fluid passes, is cooled by means of an electronic cooling element and a flow rate of the fluid is measured on the basis of a temperature of a surface of the tube cooled. Not only can the flow rate of the liquid flowing through the tube be determined in a noncontacting manner and a very small flow rate of the liquid be determined, but also the tube is cooled so that no bubbles are generated, and thus the measurement of the liquid, which is apt to generate gases, such as low boiling point liquid, is possible. In addition, the measurement is not influenced by the gases dissolved in the liquid and merely the temperature difference resulting from the flow of the fluid, that is, the rise of the temperature of the fluid, is detected to prevent the measurement from being influenced by the installing posture of the flow meter, so that a highly accurate measurement is possible. Consequently, stable and sure controlling flow rate of liquid is possible.

Flow meter for measuring fluid flow with multiple temperature sensors

A part of a tube, through which a fluid passes, is cooled by means of an electronic cooling element and a flow rate of the fluid is measured on the basis of a temperature of a surface of the tube cooled. Not only can the flow rate of the liquid flowing through the tube be determined in a noncontacting manner and a very small flow rate of the liquid be determined, but also the tube is cooled so that no bubbles are generated, and thus the measurment of the liquid, which is apt to generate gases, such as low boiling point liquid, is possible. In addition, the measurement is not influenced by the gases dissolved in the liquid and merely the temperature difference resulting from the flow of the fluid, that is, the rise of the temperature of the fluid, is detected to prevent the measurement from being influenced by the installing posture of the flow meter, so that a highly accurate measurement is possible. Consequently, stable and sure controlling flow rate of liquid is possible.

Growing community of inventors

Kyoto, Japan

Noriyuki Kimura