Nippon Kogaku K.k.

Noriyoshi Hashimoto

Mikio Ito

Kikuo Tamura

Kazuaki Saiki

Kenji Miwa

Koichi Kudo

Kuniyuki Yoshikawa

Aiichi Ishikawa

In order to appropriately position a specimen within a view finder of a microscope, the stage supporting the specimen must be quickly and smoothly moved in all directions of two dimensions X and Y. According to the present invention, this can be accomplished by dividing a tilt angle of an operation lever of a joy stick into three regions, an insensitive band, a low velocity region and a high velocity region. For each of latter two regions, a relevant signal is produced by the joy stick and transferred to a microcomputer which controls stage driving motors by sawtooth pulse voltages. The velocities of X- and Y-stages are generally setted in the microcomputer so as to be high for the high speed region and low for the low speed regions, and movements in X- and Y-directions alternate by a short time interval, thus quick and smooth movements of stages being enabled.

System for driving a movable stage

A microscope provided with a revolver having objective lenses mounted thereon and rotatable to move the objective lenses into an observation optical path comprises means for varying the load torque for rotation of the revolver at the rotated position of the revolver when the objective lenses face a predetermined position in the observation optical path, an electric motor, circuit means for driving the electric motor, means for transmitting the rotation of the electric motor to the revolver, and means for detecting the fluctuation of the load of the electric motor caused by a variation in the rotational torque of the revolver, and means for acting on the circuit means to stop the rotation of the electric motor in response to the detecting means.

Driving device for a revolver in a microscope

An alignment apparatus for positioning a substrate in a determined position comprises three rotating rollers having outer circumferences contactable with the circumference of the substrate at three different portions thereof. A first roller and at least one of the remaining rollers are driven to rotate the substrate in a predetermined direction. A holder holds the first roller and is displaceably biased toward the remaining rollers. A rotation inhibitor comes into close contact with a flat on the substrate when the substrate comes to a predetermined rotated position in which the flat and the first roller are in opposition to each other. The rotation inhibitor is provided integrally with the holder in such a predetermined positional relation to the first roller that as a result of the close contact with the flat of the substrate, the inhibitor can inhibit the holder from being moved in the direction for contact between the first roller and the flat.

Apparatus for conveying semiconductor substrates

This specification discloses a dark current correcting device in a spectrophotometer utilizing, as the photoelectric converting element, an image sensor capable of electrical scanning such as a photo-diode array to improve the scanning speed and the reliability, thus eliminating the error component by the dark current from the photoelectric conversion signal obtained from each photoelectric converting element of the image sensor and enabling obtainment of a true photoelectric conversion signal.

Spectrophotometer capable of correcting a dark current

This specification discloses a spectrophotometer utilizing, as the photoelectrical converting element, an image sensor capable of electrical scanning such as a photo-diode array, thus adjusting the integration time thereof, namely, the scanning time of the image sensor and enhancing the S/N (signal-to-noise ratio).

Spectrophotometer receiving a variable quantity of light

A spectrophotometer has an image sensor capable of electrically scanning, such as a photo-diode array, as a photoelectrical converting element. A photoelectrical conversion signal is obtained corresponding to an arbitrarily selected wavelength from the signal time-sequentially produced from a one-dimensional image sensor by means of such a simple structure.

Growing community of inventors

Chofu, Japan

Noriyoshi Hashimoto