Kabushiki Kaisha Toshiba

Felica Networks, Inc.

Tokyo Kogaku Kikai Kabushiki Kaisha

Sony Corporation

Tokyo Shibaura Electric Co., Ltd.

Norio Uchida

Nobutaka Kikuiri

Taro Kurita

Minoru Handa

Yoriyuki Ishibashi

Masayuki Masuyama

Toshio Hirokawa

Makoto Watanabe

Toshiyuki Sudo

Ryoichi Hirano

Hideaki Ozawa

Tadashi Imai

Tomonori Nakajima

Mitsuru Ikeda

Hiroyuki Takamatsu

Hiroaki Shimozono

Jun Nishida

Osamu Kuwabara

Toshiyuki Nagano

Teruyuki Toyoda

Nakaba Komiyama

Goujin Arakawa

A tuner module includes a tuner module substrate having a tuner function part formed thereon, a case body having a shielding function of holding and incorporating at least the tuner module substrate, a circuit board on which the tuner module substrate is mounted, and at least one antenna connector to be fixed to the case body and having a core wire connected to the tuner module substrate incorporated in the case body. A part of the circuit board is contained inside the case body.

Tuner module and receiving device

A reader/writer that reads or writes information from or in an Integrated Circuit (IC) module, in which one or more applications are loaded, in response to an instruction issued from a controller in which counter-applications compatible with the applications are loaded. The reader/writer includes a memory in which one or more pieces of IC access authentication information that are associated with the applications in the IC module and that are used to authenticate the associated applications respectively are stored. The memory also stores pieces of group authentication information. A control unit authenticates a counter-application using group authentication information and, if the authentication succeeds, permits the counter-application to use IC access authentication information belonging to a group identified with the group authentication information.

Communication system, reader/writer, authentication method, and computer program

A reader/writer apparatus to communicate with an external radio communication apparatus in accordance with instructions from a controller apparatus is provided. The reader/writer apparatus includes a storage unit including one or more key storing segments to store access keys that enable communication with the radio communication apparatus; an access key searching unit configured to search for an access key stored in one of the key storing segments on the basis of key-associated information that is received from the controller apparatus and that can uniquely specify the access key; and a communication unit configured to receive instructions from the controller apparatus, generate a command corresponding to the instructions, and transmit the command to the radio communication apparatus by using the access key obtained by the access key searching unit.

Radio communication system, reader/writer apparatus, key managing method, and computer program

A exposure apparatus for a semiconductor wafer, a liquid crystal display panel and so on. The exposure apparatus comprises a light source, a holding means and a moving means. The light source exposes a target such as a semiconductor wafer, a liquid crystal display panel and so on. The holding means alternately holds and releases the target. The moving means for moving the holding means includes a table and a shifting means. The table moves in the direction of the light source. The shifting means shifts the holding means toward or against the table.

Exposure apparatus

Disclosed is an X-ray exposure apparatus comprising a chamber, filled with X-ray low attenuation gas for guiding X-rays, generated from an X-ray source, to an X-ray window, a gas supplying portion, provided to supply X-ray low attenuation gas into the chamber and having a portion with a small-diameter passage cross section formed at least at a part thereof, a gas discharging portion, provided to discharge gas from the chamber and having a portion with a small-diameter passage cross section formed at least at a part thereof, and a flow-rate controller for controlling a flow rate of the gas to be supplied to the gas supplying portion to thereby control pressure in the chamber, whereby pressure in the chamber is made equal to or slightly higher than atmospheric pressure by setting the small-diameter portion of the gas supplying portion smaller than that of the gas discharging portion.

X-ray exposure apparatus

An apparatus for setting the gap distance between a mask and a wafer, facing with each other to a predetermined distance, is arranged as follows. A wafer stage is movable along a reference plane defined as a plane parallel to the transferring direction of the wafer and supports the wafer. The wafer stage has a .theta..sub.Y table for tilting the wafer and a first displacement sensor. A mask stage supports the mask and has a .theta..sub.Y table for tilting the mask and two second displacement sensors. The first sensor scans the mask in response to the movement of the wafer stage, whereby an error in the parallelism of the wafer with respect to the reference plane is measured. The mask is kept parallel to the reference plane by tilting the mask so as to eliminate the error in the parallelism. Distances from the second sensors to two points on the wafer are measured by the second sensors. The gap distances between the mask and two points on the wafer are obtained by substracting the distance between the mask and second sensors from the measured distances, individually. The mask and the wafer are kept parallel to each other by tilting the wafer so as to eliminate the error in the parallelism thus obtained, and the gap distance between the mask and wafer is adjusted to be set at the predetermined distance.

Method and apparatus for setting the gap distance between a mask and a

An X-ray radiation apparatus comprises a synchrotron 11 that generates X rays, an X-ray reflecting mirror 13 that reflects X rays emitted from the synchrotron 11, a mirror driving mechanism that enlarges the X-ray illumination area by oscillating the mirror 13, a beryllium window 14 that is connected to the synchrotron-side housing base containing the mirror 13 by means of a bellows 17 and that allows the X rays reflected by the mirror 13 to be taken out of the vacuum environment, and a window driving mechanism 18 that moves the window 14 along with the movement of the X-ray illumination position by oscillating the window 14 in synchronization with the oscillation of the mirror 13. With this arrangement, the X rays coming from the window 14 pass through the X-ray mask 15 and fall upon the specimen 16 to replicate the mask pattern into the specimen.

Synchrotron radiation apparatus

A carrier apparatus for carrying a plane member such as a semiconductor wafer, a mask for exposure, a optical disk substrate, a liquid crystal panel and so on. To hold such a flat member tightly, the carrier apparatus comprises an elastic member between a holding part and a carrier arm.

Carrier apparatus

According to this invention, a method and apparatus for aligning a mask and a wafer arranged to oppose each other, in a direction along their opposing surfaces, relative to each other, are arranged as follows. A first diffraction grating as a one-dimensional diffraction grating, bars of which extend in a direction perpendicular to an alignment direction, is formed on the mask. A second diffraction grating which has a checkerboard-like pattern, is formed on the wafer. The first diffraction grating is irradiated with laser beam emitted from a light source. Light beams diffracted and transmitted through the first diffraction grating is transferred to the second diffraction grating. Light beams diffracted and reflected by said second diffraction grating are transferred to said first diffraction grating. The light beams are diffracted by and transmitted through said first diffraction grating, again. Is detected, one of the diffracted light beams, which do not propagate along a predetermined plane. The light beams reflected and diffracted by the surface of the first diffraction grating, is transferred only in the predetermined plane. For this reason, the detected diffracted light beam will not interfere with reflected diffracted light beams. The mask and wafer can be precisely aligned relative to each other, in accordance with the intensity of the detected diffracted light beam.

Method for aligning first and second objects, relative to each other,

According to this invention, a method and apparatus for setting a gap to a predetermined distance between a mask and a wafer facing each other, are arranged as follows. First and second diffraction grating are formed on a mask and a wafer. The first diffraction grating is one-dimensional type and has parallel bars extending in a predetermined direction. The second diffraction grating is one-dimensional type and has parallel bars extending in a direction perpendicular to the predetermined direction. The second diffraction grating may be two-dimensional type having cross-bars. Laser beam is radiated from a light source onto the first diffraction grating. The light beams diffracted and transmitted through the first diffraction grating are transferred to the second diffraction grating. The light beams diffracted and reflected by the second diffraction grating are transferred to the first diffraction grating. The light beams are diffracted and transmitted through the first diffraction grating. Is detected, one of the diffracted light beams which are not oriented along a predetermined. The light beams reflected and diffracted by the surface of the first diffraction grating is transferred only by the prdetermined plane. Therefore, detected and diffracted light beam does not interfere with reflected light beams. The gap between the mask and the wafer can be adjusted and can be set to a predetermined distance.

Method and apparatus for setting a gap between first and second objects

A vibration absorber for rotating body of this invention comprises a disc capable of moving only in the horizontal direction accompanying the vibration of a pivot and an annular plate placed on the disc and capable of moving only in the vertical direction, the vibration energy of rotating body being absorbed by the shearing force of an oil film formed by the relative motion between the horizontally moving disc and the vertically moving annular plate.

Growing community of inventors

Kanagawa, Japan

Norio Uchida