Hewlett-Packard Company

Norio Sone

Hideo Akama

Yoshiyuki Bessho

Masaharu Goto

Yuko Iwasaki

A prober interface card is provided which improves dielectric absorption characteristics between needles and signal patterns, and conductors with different potentials. A side guard conductor, having a specific height and depth, is disposed so that there is no insulating material between a needle with a connected signal pattern and an adjacent needle with its side guard conductor.

Prober interface card for shortening the settling time

A signal switching apparatus performs precise and high speed measurements that indicate DUT breakdown. Several switching circuits having multiple signal switching apparatus provided in parallel with input terminals and output terminals. Each switching circuit is structured to have; (a) A first switch circuit which inputs the guard signal together with the low current measurement signal; (b) a current limiting circuit connected to a stress signal terminal on the input; (c) a second switch circuit connected on the input to the output of the current limiting circuit, having a guard terminal connected to the output of the first switch circuit; (d) A guarded line, one end of which is connected to the output terminals, and the other end of which is connected to the first switch circuit and the output of second switch circuit.

Switching apparatus with current limiting circuit

Disclosed is a measurement method and apparatus by which measurement of the breakdown voltage of a semiconductor device under test (DUT) may be conducted with an inexpensive measuring system in which thermal stress applied to the DUT is small and thus measurement error caused by characteristic change of the DUT is less. A constant current smaller than the breakdown current of the DUT is applied to a DUT using a constant current source, and waveforms between terminals of said DUT are observed by a waveform observation device, thereby measuring the trigger voltage and the latchback voltage. When a constant current I is applied to the DUT from the constant current source, a stray capacitance C between terminals of said DUT is charged. Thus, the voltage between terminals of said DUT is increased with a constant inclination (I/C) as time goes by.

Method and apparatus for measuring trigger and latchback voltage of a

An apparatus for producing a high voltage comprising a high voltage output means operating on a system common voltage, and a floating power supply means operating on the output voltage from the high voltage output means which is at a floating common potential.

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Tachikawashi, Japan

Norio Sone