Nikon Corporation

Norio Murayama

Hideki Komatsuda

Susumu Sato

Daisaku Arai

Yoshiyuki Shimizu

Marie Shimoyama

Sayako Yamamoto

Misa Kawamura

An imaging device () is configured by being provided with an image pickup element () where an imaging surface () having a concave surface facing an object side is formed, an imaging optical system () which forms an image on the imaging surface () in a range smaller than the imaging surface (), and an oscillating drive section () which oscillating-drives the imaging optical system () so that a direction of an optical axis Z of the imaging optical system changes. The imaging element () captures a first formed by the imaging optical system () with a direction of the optical axis Z set to a first direction and a 2nd formed by the imaging optical system () with a direction of the optical axis Z set to a 2nd direction, in different regions in the imaging surfaces ().

Imaging device, imaging optical system, method for manufacturing imaging device, and imaging method

A zoom lens comprising, in order from an object side: a first lens group Ghaving positive refractive power; a second lens group Ghaving negative refractive power; and a third lens group Ghaving positive refractive power; each distance between said lens groups adjacent to each other changing upon zooming from a wide-angle end state to a telephoto end state, said first lens group Ghaving a cemented lens including a negative lens L, and said third lens group Ghaving a cemented lens Land L, and a given conditional expression being satisfied, thereby providing a downsized zoom lens having high optical performance.

Zoom lens, imaging apparatus and method for manufacturing zoom lens

The present invention provides a zoom lens ZL comprising a first lens group Ghaving positive refractive power, a second lens group Ghaving negative refractive power, a third lens group Ghaving positive refractive power, and a fourth lens group Ghaving positive refractive power, the first lens group Gincluding a negative meniscus lens Land a positive meniscus lens L, the second lens group Gincluding a negative meniscus lens L, a biconcave negative lens Land a positive meniscus lens L, and the fourth lens group Gincluding one positive lens L, and the refractive indexes of at least three lenses in the zoom lens ZL being greater than 1.9.

Zoom lens, optical apparatus, and method for manufacturing zoom lens

An exposure apparatus comprises an X-ray source (,), an illumination system (,) for guiding said X-ray from an X-ray source to a mask (,), a projection system (,) for projecting a pattern on said mask by guiding said X-ray to an exposed plane (,) through a mask, wherein a projection system comprises a plurality of mirrors (,), and at least one reflection mirror (,) is interchangeable with a reflection mirror (,) having a different surface shape.

Method for manufacturing a device, an exposure apparatus, and a method for manufacturing an exposure apparatus

A microscope objective, and microscope incorporating same, are disclosed. A representative embodiment of the objective comprises, arranged on an optical axis, a front lens group having positive refractive power disposed on the object side, a rear lens group having negative refractive power disposed on the image side, and a corrective lens group interposed between the front and rear lens groups. The corrective lens group is axially movable and comprises a pair of meniscus lens elements each of which having a convex surface oriented toward each other. The corrective lens group serves to correct aberrations arising from a cover glass or other refractive body situated between the specimen being observed and the objective lens. To such end, the objective preferably satisfies the conditions:

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Musashino, Japan

Norio Murayama