Nikon Corporation

Norio Miyake

Kinya Kato

Masaya Yamamoto

Osamu Tanitsu

Hirohisa Tanaka

Fumio Suzuki

Yasushi Mizuno

Hiroaki Nakayama

Hiroyuki Hirota

Kouji Muramatsu

Ryuji Takaya

Risa Yoshimoto

A microscope including an illumination optical system having an objective lens and a fly-eye lens, where: the fly-eye lens having a plurality of lens elements; in the illumination optical system, images of the plurality of lens elements are projected on a pupil of the objective lens; and the number (n) of the images of the lens elements projected inside the pupil of the objective lens is more than the number (n) of the images of the lens elements projected on an outer perimeter of the pupil of the objective lens. In the above observation optical system, a first objective lens having a first pupil diameter and a second objective lens having a pupil diameter larger than the first pupil diameter are switchable, and a number nmay be greater than a number nwith respect to the first objective lens.

Microscope including an illumination optical system having a plurality of lens elements

An illumination optical system includes a first spatial light modulator having a plurality of optical elements into which the light from the light source comes, a polarizing member having a first polarizing element into which a first light of a light from the first spatial light modulator comes and a second polarizing element into which a second light of the light from the first spatial light modulator comes, so as to allow the first light traveled via the first polarizing element and the second light traveled via the second polarizing element to have polarizing states different from each other, the first and second lights traveling through positions relative to an optical axis of the illumination optical system different from each other, and a second spatial light modulator having a plurality of optical elements into which the first and second lights from the polarizing member come.

Illumination optical assembly, exposure device, and device manufacturing method

An illumination optical system includes a fly's-eye lens having a back focal plane arranged on a pupil plane of the illumination optical system or in a vicinity of the pupil plane; a first spatial light modulator which is arranged on an incident side of the fly's-eye lens and which includes a plurality of first mirror elements; a first optical system arranged in an optical path between the first spatial light modulator and the fly's-eye lens; a second spatial light modulator arranged in an optical path between the first optical system and the fly's-eye lens and which includes a plurality of second mirror elements; and a polarizing element arranged in the optical path between the first spatial light modulator and the fly's-eye lens.

There is provided an illumination optical system for illuminating an illumination objective surface. The illumination optical system includes a first spatial light modulator which has a plurality of optical elements arranged on a first plane, a polarizing member which is arranged in an optical path on an illumination objective surface side with respect to the first plane and which gives a polarization state change to a first light beam passes through a first area in a plane intersecting an optical axis of the illumination optical system, the polarization state change being different from a polarization state change given to a second light beam passes through a second area in the intersecting plane, and a second spatial light modulator which has a plurality of optical elements controlled individually and arranged on a second plane, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system.

An illumination optical system is one for illuminating a surface to be illuminated with light from a light source, which has a distribution forming optical system including an optical integrator and forming a pupil intensity distribution on an illumination pupil located behind the optical integrator, and an optical attenuator arranged on a predetermined surface in an optical path behind the optical integrator and having an attenuation characteristic of varying an attenuation rate depending upon an angle of incidence to the predetermined surface.

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Tokyo, Japan

Norio Miyake