Olympus Corporation

Olympus Optical Company, Ltd.

Norio Maruyama

Daisuke Yokoi

Terumasa Morita

Masato Yabe

Yukio Eda

Go Ryu

Yoshihisa Taniguchi

Yasuo Mori

A microscope apparatus including a light source device, a storage table, and a setting controller is provided. The light source device includes a light intensity adjuster which changes light intensity of an illumination light of plural different wavelength regions selectively extracted from light emitted from a light source, and thereby emitting the illumination light including light of the plural different wavelength regions in such a manner that a light intensity ratio of light of one wavelength region to light of another wavelength region is variable. The storage table stores therein set values of the light intensity adjuster for each of combination patterns of the wavelength regions of the illumination light emitted from the light source device. The setting controller makes the light source device change a setting of the light intensity adjuster based on the set value stored in the storage table according to wavelength designation information which designates a combination pattern of the wavelength regions.

Microscope apparatus

A wavelength selection unit includes a light source which emits light of at least a predetermined wavelength region, a collector lens which collects the light emitted from the light source and emits a parallel flux which is inclined relative to a light axis of an optical system of itself, a selective reflection optical system which reflects light of a predetermined wavelength region from the parallel flux selectively, and a returning optical system which returns each reflected flux reflected by the selective reflection optical system symmetrically about a reflected light axis of the selective reflection optical system. The collector lens collects a back flux which is returned by the returning optical system and which is re-reflected by the selective reflection optical system, and forms a light source image of the light source.

Light source apparatus and microscope apparatus

This invention provides a substrate transportation apparatus in which a loader and macroinspection/transportation section are separate to be independent of each other. The loader can be arranged on the left side or rear side of the macroinspection/transportation section when seen from the front side. The substrate transportation apparatus can easily be changed in accordance with various types of specifications of apparatus layout.

Substrate transportation apparatus

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Hachioji, Japan

Norio Maruyama